JPS5326192A - Compound analyzer - Google Patents

Compound analyzer

Info

Publication number
JPS5326192A
JPS5326192A JP9971876A JP9971876A JPS5326192A JP S5326192 A JPS5326192 A JP S5326192A JP 9971876 A JP9971876 A JP 9971876A JP 9971876 A JP9971876 A JP 9971876A JP S5326192 A JPS5326192 A JP S5326192A
Authority
JP
Japan
Prior art keywords
compound analyzer
controlling
radiation
analyzer
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9971876A
Other languages
Japanese (ja)
Inventor
Susumu Kawase
Kazunobu Hayakawa
Hiroshi Doi
Masakazu Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9971876A priority Critical patent/JPS5326192A/en
Publication of JPS5326192A publication Critical patent/JPS5326192A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make possible easy controlling of an electron beam and ion beam by adding deflecting means for controlling of radiation in additon to polarizing means for scanning respectively possessed by radiation systems.
JP9971876A 1976-08-23 1976-08-23 Compound analyzer Pending JPS5326192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9971876A JPS5326192A (en) 1976-08-23 1976-08-23 Compound analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9971876A JPS5326192A (en) 1976-08-23 1976-08-23 Compound analyzer

Publications (1)

Publication Number Publication Date
JPS5326192A true JPS5326192A (en) 1978-03-10

Family

ID=14254845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9971876A Pending JPS5326192A (en) 1976-08-23 1976-08-23 Compound analyzer

Country Status (1)

Country Link
JP (1) JPS5326192A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638864U (en) * 1979-08-31 1981-04-11
JPS5681806U (en) * 1979-11-29 1981-07-02
EP0084850A2 (en) * 1982-01-22 1983-08-03 Hitachi, Ltd. Apparatus for irradiation with charged particle beams

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638864U (en) * 1979-08-31 1981-04-11
JPS6324435Y2 (en) * 1979-08-31 1988-07-05
JPS5681806U (en) * 1979-11-29 1981-07-02
EP0084850A2 (en) * 1982-01-22 1983-08-03 Hitachi, Ltd. Apparatus for irradiation with charged particle beams

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