JPS5289382A - Ion micro-analizer - Google Patents

Ion micro-analizer

Info

Publication number
JPS5289382A
JPS5289382A JP492876A JP492876A JPS5289382A JP S5289382 A JPS5289382 A JP S5289382A JP 492876 A JP492876 A JP 492876A JP 492876 A JP492876 A JP 492876A JP S5289382 A JPS5289382 A JP S5289382A
Authority
JP
Japan
Prior art keywords
ion
analizer
micro
ion micro
additionally provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP492876A
Other languages
Japanese (ja)
Inventor
Hifumi Tamura
Toru Ishitani
Norio Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP492876A priority Critical patent/JPS5289382A/en
Priority to US05/751,986 priority patent/US4081674A/en
Priority to DE2659385A priority patent/DE2659385C3/en
Publication of JPS5289382A publication Critical patent/JPS5289382A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To provide an ion micro-analizer, in which ion-beam deflecting means is additionally provided between ion source and primary ion focusing system, so as to obtain ion beam enabling micro analysis, and in which ion beam and high-speed particle beam can be both used.
JP492876A 1976-01-21 1976-01-21 Ion micro-analizer Pending JPS5289382A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP492876A JPS5289382A (en) 1976-01-21 1976-01-21 Ion micro-analizer
US05/751,986 US4081674A (en) 1976-01-21 1976-12-20 Ion microprobe analyzer
DE2659385A DE2659385C3 (en) 1976-01-21 1976-12-29 Ion microprobe analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP492876A JPS5289382A (en) 1976-01-21 1976-01-21 Ion micro-analizer

Publications (1)

Publication Number Publication Date
JPS5289382A true JPS5289382A (en) 1977-07-26

Family

ID=11597247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP492876A Pending JPS5289382A (en) 1976-01-21 1976-01-21 Ion micro-analizer

Country Status (1)

Country Link
JP (1) JPS5289382A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6017845A (en) * 1983-07-11 1985-01-29 Hitachi Ltd Ion microanalyzer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036396A (en) * 1973-06-20 1975-04-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5036396A (en) * 1973-06-20 1975-04-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6017845A (en) * 1983-07-11 1985-01-29 Hitachi Ltd Ion microanalyzer

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