JPS5366295A - Solid element analytical apparatus - Google Patents

Solid element analytical apparatus

Info

Publication number
JPS5366295A
JPS5366295A JP14124776A JP14124776A JPS5366295A JP S5366295 A JPS5366295 A JP S5366295A JP 14124776 A JP14124776 A JP 14124776A JP 14124776 A JP14124776 A JP 14124776A JP S5366295 A JPS5366295 A JP S5366295A
Authority
JP
Japan
Prior art keywords
solid element
analytical apparatus
element analytical
energy analyzer
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14124776A
Other languages
Japanese (ja)
Inventor
Kazunobu Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14124776A priority Critical patent/JPS5366295A/en
Publication of JPS5366295A publication Critical patent/JPS5366295A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To enable to obtain the element distribution signal, having different depth at the same time, using one primary electron probe, by combining electron energy analyzer and X-ray energy analyzer, in order to take out element analytical signal.
JP14124776A 1976-11-26 1976-11-26 Solid element analytical apparatus Pending JPS5366295A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14124776A JPS5366295A (en) 1976-11-26 1976-11-26 Solid element analytical apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14124776A JPS5366295A (en) 1976-11-26 1976-11-26 Solid element analytical apparatus

Publications (1)

Publication Number Publication Date
JPS5366295A true JPS5366295A (en) 1978-06-13

Family

ID=15287494

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14124776A Pending JPS5366295A (en) 1976-11-26 1976-11-26 Solid element analytical apparatus

Country Status (1)

Country Link
JP (1) JPS5366295A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104748A (en) * 1979-02-06 1980-08-11 Permelec Electrode Ltd Non dispersion type fluorescence x-ray analyzing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55104748A (en) * 1979-02-06 1980-08-11 Permelec Electrode Ltd Non dispersion type fluorescence x-ray analyzing device

Similar Documents

Publication Publication Date Title
JPS5364089A (en) Solid ion source
JPS5366295A (en) Solid element analytical apparatus
JPS5237462A (en) Method of measuring shape of flat plates
JPS51115888A (en) Enzyme analyzer
JPS545778A (en) Gas density analyzer
JPS5397894A (en) High frequency circuit for nuclear magnetism resonance device
JPS5355094A (en) X-ray microanalyzer
JPS52104289A (en) Atomic spectrum generator
JPS5224548A (en) Artificial snowfall device
JPS5224585A (en) X-ray analysis apparatus
JPS52125266A (en) Cathode constant length welder unit in cathode ray tube
JPS529491A (en) Internal electrode
JPS5410791A (en) Measurement of electron-spin resonance
JPS51142311A (en) Method for examining a visual function by leadinga visual line in an o phthalmological instrument
JPS53112675A (en) Discriminator for waveform
JPS5328488A (en) Specimen analyzer
JPS5329184A (en) Eddy current flaw detector
JPS5371893A (en) Auger analytical apparatus of broken face
JPS5434172A (en) Electromagnetic-shielding dust-proof constant-temperature chamber
JPS51143357A (en) X-ray analyzer
JPS53119091A (en) Electron ray energy analyzer
JPS5245386A (en) Radiation monitoring device
JPS5377179A (en) Testing apparatus
JPS5438184A (en) Radiation counter
JPS5386292A (en) Chemical analyzer