JPS5328488A - Specimen analyzer - Google Patents

Specimen analyzer

Info

Publication number
JPS5328488A
JPS5328488A JP10267476A JP10267476A JPS5328488A JP S5328488 A JPS5328488 A JP S5328488A JP 10267476 A JP10267476 A JP 10267476A JP 10267476 A JP10267476 A JP 10267476A JP S5328488 A JPS5328488 A JP S5328488A
Authority
JP
Japan
Prior art keywords
specimen analyzer
plnae
memorized
contents
analysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10267476A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ishikawa
Nobuo Hamamoto
Kazuo Ichino
Sumitaka Goto
Kazunobu Hayakawa
Michiyasu Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10267476A priority Critical patent/JPS5328488A/en
Publication of JPS5328488A publication Critical patent/JPS5328488A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Abstract

PURPOSE:To efficiently carry out experiment, by assigning plural necessary place for analysis to be memorized in image plnae, and after that, by causing deflection of primary terminal beam depending on contents of memory.
JP10267476A 1976-08-30 1976-08-30 Specimen analyzer Pending JPS5328488A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10267476A JPS5328488A (en) 1976-08-30 1976-08-30 Specimen analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10267476A JPS5328488A (en) 1976-08-30 1976-08-30 Specimen analyzer

Publications (1)

Publication Number Publication Date
JPS5328488A true JPS5328488A (en) 1978-03-16

Family

ID=14333768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10267476A Pending JPS5328488A (en) 1976-08-30 1976-08-30 Specimen analyzer

Country Status (1)

Country Link
JP (1) JPS5328488A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61218057A (en) * 1985-03-25 1986-09-27 Hitachi Ltd Ion microanalyzer
JPH01176643A (en) * 1988-01-04 1989-07-13 Jeol Ltd Control type of electron beam deflection system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61218057A (en) * 1985-03-25 1986-09-27 Hitachi Ltd Ion microanalyzer
JPH0527938B2 (en) * 1985-03-25 1993-04-22 Hitachi Ltd
JPH01176643A (en) * 1988-01-04 1989-07-13 Jeol Ltd Control type of electron beam deflection system

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