JPS5359484A - Reflection type electron-diffraction apparatus - Google Patents

Reflection type electron-diffraction apparatus

Info

Publication number
JPS5359484A
JPS5359484A JP13405476A JP13405476A JPS5359484A JP S5359484 A JPS5359484 A JP S5359484A JP 13405476 A JP13405476 A JP 13405476A JP 13405476 A JP13405476 A JP 13405476A JP S5359484 A JPS5359484 A JP S5359484A
Authority
JP
Japan
Prior art keywords
type electron
reflection type
diffraction apparatus
primary electron
electron ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13405476A
Other languages
Japanese (ja)
Inventor
Kazunobu Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13405476A priority Critical patent/JPS5359484A/en
Publication of JPS5359484A publication Critical patent/JPS5359484A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make possible to carry out the elementary analysis for the crystal surface simultaneously in the reflection type electron-diffraction apparatus for very small portion of the surface employing the thin flux of the primary electron ray, by arrnaging the primary electron ray irradiating system and the cylindrical mirror type electron energy analyzer on the same axis.
JP13405476A 1976-11-10 1976-11-10 Reflection type electron-diffraction apparatus Pending JPS5359484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13405476A JPS5359484A (en) 1976-11-10 1976-11-10 Reflection type electron-diffraction apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13405476A JPS5359484A (en) 1976-11-10 1976-11-10 Reflection type electron-diffraction apparatus

Publications (1)

Publication Number Publication Date
JPS5359484A true JPS5359484A (en) 1978-05-29

Family

ID=15119276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13405476A Pending JPS5359484A (en) 1976-11-10 1976-11-10 Reflection type electron-diffraction apparatus

Country Status (1)

Country Link
JP (1) JPS5359484A (en)

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