JPS53119091A - Electron ray energy analyzer - Google Patents

Electron ray energy analyzer

Info

Publication number
JPS53119091A
JPS53119091A JP3414077A JP3414077A JPS53119091A JP S53119091 A JPS53119091 A JP S53119091A JP 3414077 A JP3414077 A JP 3414077A JP 3414077 A JP3414077 A JP 3414077A JP S53119091 A JPS53119091 A JP S53119091A
Authority
JP
Japan
Prior art keywords
energy analyzer
ray energy
electron ray
analyzer
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3414077A
Other languages
Japanese (ja)
Inventor
Kouhei Shirota
Kenji Obara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3414077A priority Critical patent/JPS53119091A/en
Publication of JPS53119091A publication Critical patent/JPS53119091A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To make simple the energy analyzer of an analyzer by making use of the sweep excitation current of an imaging lens in an electron microscope, etc.
JP3414077A 1977-03-28 1977-03-28 Electron ray energy analyzer Pending JPS53119091A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3414077A JPS53119091A (en) 1977-03-28 1977-03-28 Electron ray energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3414077A JPS53119091A (en) 1977-03-28 1977-03-28 Electron ray energy analyzer

Publications (1)

Publication Number Publication Date
JPS53119091A true JPS53119091A (en) 1978-10-18

Family

ID=12405899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3414077A Pending JPS53119091A (en) 1977-03-28 1977-03-28 Electron ray energy analyzer

Country Status (1)

Country Link
JP (1) JPS53119091A (en)

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