JPS52100286A - Solid surface analyzer - Google Patents
Solid surface analyzerInfo
- Publication number
- JPS52100286A JPS52100286A JP1602376A JP1602376A JPS52100286A JP S52100286 A JPS52100286 A JP S52100286A JP 1602376 A JP1602376 A JP 1602376A JP 1602376 A JP1602376 A JP 1602376A JP S52100286 A JPS52100286 A JP S52100286A
- Authority
- JP
- Japan
- Prior art keywords
- solid surface
- surface analyzer
- converges
- separates
- positive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: To make possible throttling of beams finely in a state where beam intensity is high, with an ion source which separates and converges positive or negative ions only by using a quadruple pole lens group.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51016023A JPS5947423B2 (en) | 1976-02-18 | 1976-02-18 | Solid surface analysis device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51016023A JPS5947423B2 (en) | 1976-02-18 | 1976-02-18 | Solid surface analysis device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52100286A true JPS52100286A (en) | 1977-08-23 |
JPS5947423B2 JPS5947423B2 (en) | 1984-11-19 |
Family
ID=11904955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51016023A Expired JPS5947423B2 (en) | 1976-02-18 | 1976-02-18 | Solid surface analysis device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5947423B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020057510A (en) * | 2018-10-02 | 2020-04-09 | 株式会社アルバック | Ion gun controller and ion gun control method |
-
1976
- 1976-02-18 JP JP51016023A patent/JPS5947423B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020057510A (en) * | 2018-10-02 | 2020-04-09 | 株式会社アルバック | Ion gun controller and ion gun control method |
Also Published As
Publication number | Publication date |
---|---|
JPS5947423B2 (en) | 1984-11-19 |
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