JPS5376887A - Ion microanalyzer - Google Patents

Ion microanalyzer

Info

Publication number
JPS5376887A
JPS5376887A JP15199176A JP15199176A JPS5376887A JP S5376887 A JPS5376887 A JP S5376887A JP 15199176 A JP15199176 A JP 15199176A JP 15199176 A JP15199176 A JP 15199176A JP S5376887 A JPS5376887 A JP S5376887A
Authority
JP
Japan
Prior art keywords
reflecting mirror
ion microanalyzer
ion
microanalyzer
insertable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15199176A
Other languages
Japanese (ja)
Inventor
Mitsuo Fujiwara
Atsushi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15199176A priority Critical patent/JPS5376887A/en
Publication of JPS5376887A publication Critical patent/JPS5376887A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge

Abstract

PURPOSE:To reduce the contamination of a reflecting mirror produced by the materials flying off from the specimen by movably constituting a stereoscopic microscope in such a way that its reflecting mirror is insertable to the passage where ion beam passes.
JP15199176A 1976-12-20 1976-12-20 Ion microanalyzer Pending JPS5376887A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15199176A JPS5376887A (en) 1976-12-20 1976-12-20 Ion microanalyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15199176A JPS5376887A (en) 1976-12-20 1976-12-20 Ion microanalyzer

Publications (1)

Publication Number Publication Date
JPS5376887A true JPS5376887A (en) 1978-07-07

Family

ID=15530662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15199176A Pending JPS5376887A (en) 1976-12-20 1976-12-20 Ion microanalyzer

Country Status (1)

Country Link
JP (1) JPS5376887A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4829178A (en) * 1987-03-30 1989-05-09 Vg Instruments Group Limited Apparatus for surface analysis

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4829178A (en) * 1987-03-30 1989-05-09 Vg Instruments Group Limited Apparatus for surface analysis

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