GB1493133A - Preparation of specimens to be examined by electron microscopy techniques - Google Patents

Preparation of specimens to be examined by electron microscopy techniques

Info

Publication number
GB1493133A
GB1493133A GB3024974A GB3024974A GB1493133A GB 1493133 A GB1493133 A GB 1493133A GB 3024974 A GB3024974 A GB 3024974A GB 3024974 A GB3024974 A GB 3024974A GB 1493133 A GB1493133 A GB 1493133A
Authority
GB
United Kingdom
Prior art keywords
ion
specimens
examined
preparation
electron microscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3024974A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB3024974A priority Critical patent/GB1493133A/en
Publication of GB1493133A publication Critical patent/GB1493133A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

1493133 Ion beam apparatus J FRANKS 8 Oct 1975 [8 July 1974] 30249/74 Heading H1D An electron microscope sample 8 is reduced in thickness by bombardment by at least one ion beam, in this case two beams 28, 30 from sources 2, 4, while the sample is rotated in its mount 10 by a gear 16 and the ion beam angle of incidence is varied, in Fig. 1 by rotating an arm 6 supporting the two ion sources, or by rotating the sample holder to produce the same relative movement. In Fig. 3 (not shown) a single broad beam ion source is used and the second ion source in Fig. 1 is replaced by a counterweight.
GB3024974A 1975-10-08 1975-10-08 Preparation of specimens to be examined by electron microscopy techniques Expired GB1493133A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3024974A GB1493133A (en) 1975-10-08 1975-10-08 Preparation of specimens to be examined by electron microscopy techniques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3024974A GB1493133A (en) 1975-10-08 1975-10-08 Preparation of specimens to be examined by electron microscopy techniques

Publications (1)

Publication Number Publication Date
GB1493133A true GB1493133A (en) 1977-11-23

Family

ID=10304654

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3024974A Expired GB1493133A (en) 1975-10-08 1975-10-08 Preparation of specimens to be examined by electron microscopy techniques

Country Status (1)

Country Link
GB (1) GB1493133A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0141272A1 (en) * 1983-10-12 1985-05-15 Magyar Tudományos Akadémia Müszaki Fizikai Kutato Intézete Apparatus for processing solid state samples with ion beams
EP0703596A3 (en) * 1994-09-22 1999-01-07 Ebara Corporation Method and apparatus for energy beam machining
EP1517355A3 (en) * 2003-09-16 2009-03-04 Jeol Ltd. Apparatus and method for preparing samples
CZ310123B6 (en) * 2012-05-30 2024-09-04 Carl Zeiss Microscopy Gmbh A processing system and a method of control of the processing system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0141272A1 (en) * 1983-10-12 1985-05-15 Magyar Tudományos Akadémia Müszaki Fizikai Kutato Intézete Apparatus for processing solid state samples with ion beams
EP0703596A3 (en) * 1994-09-22 1999-01-07 Ebara Corporation Method and apparatus for energy beam machining
EP1517355A3 (en) * 2003-09-16 2009-03-04 Jeol Ltd. Apparatus and method for preparing samples
CZ310123B6 (en) * 2012-05-30 2024-09-04 Carl Zeiss Microscopy Gmbh A processing system and a method of control of the processing system

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee