GB918297A - Improvements in electron microscopes - Google Patents

Improvements in electron microscopes

Info

Publication number
GB918297A
GB918297A GB12361/60A GB1236160A GB918297A GB 918297 A GB918297 A GB 918297A GB 12361/60 A GB12361/60 A GB 12361/60A GB 1236160 A GB1236160 A GB 1236160A GB 918297 A GB918297 A GB 918297A
Authority
GB
United Kingdom
Prior art keywords
specimen
electrons
electron
analysis
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB12361/60A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB12361/60A priority Critical patent/GB918297A/en
Priority to NL263015D priority patent/NL263015A/xx
Priority to US112139A priority patent/US3155827A/en
Priority to FR17807A priority patent/FR1285063A/en
Priority to DEN19846A priority patent/DE1204350B/en
Publication of GB918297A publication Critical patent/GB918297A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/222—Image processing arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

918,297. Electron microscopes. NIXON, W. C. March 22, 1961 [April 7, 1960], No. 12361/60. Class 39 (1). An electron microscope comprises means 16, Fig. 1, to form a stream of electrons emanating from a specimen 24, focusing means 29, 30 adapted to act upon said electrons so as to form a magnified image of a preselected area of said specimen capable of being viewed on a fluorescent screen 31, means 38 to project a further stream of electrons along said focusing means in an opposite direction to said first beam so as to produce a point-focused beam of electrons on a selected portion of the said predetermined area of said specimen for local area analysis thereof, and means responsive to the action of said further stream focused on said selected portion for technical examination and analysis of said selected area. The second electron gun 38 may be located beneath the fluorescent screen 31 with a hole 33 therein for the passage of the beam or may be located to one side with a refractor block 39, Fig. 3, to align the beam on to the axis of the focusing means. Thermionic emission from a heated surface, X-ray emission, light emission under the impact of an electron beam and electron diffraction phenomena of the specimen under the action of the second beam may be analysed by use of suitable apparatus. Methods of analysis are described other than by transmission through a thin specimen, e.g. reflection microscopy and the use of mirror field methods where a refractor block or magnetic field 50, Fig. 11, receives the imaging beam, throws it on to the surface of the specimen 49 and then projects it along the axis of the microscope. A method of ion-induced emission, Fig. 13 (not shown), is described where a beam of ions is directed towards the specimen, the surface of which emits electrons which form the imaging beam.
GB12361/60A 1960-04-07 1960-04-07 Improvements in electron microscopes Expired GB918297A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
GB12361/60A GB918297A (en) 1960-04-07 1960-04-07 Improvements in electron microscopes
NL263015D NL263015A (en) 1960-04-07 1961-01-30
US112139A US3155827A (en) 1960-04-07 1961-03-24 Electron microscope with a secondary electron source utilized for electron probe analysis
FR17807A FR1285063A (en) 1960-04-07 1961-03-29 Improvements to electron microscopes
DEN19846A DE1204350B (en) 1960-04-07 1961-04-05 electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB12361/60A GB918297A (en) 1960-04-07 1960-04-07 Improvements in electron microscopes

Publications (1)

Publication Number Publication Date
GB918297A true GB918297A (en) 1963-02-13

Family

ID=10003117

Family Applications (1)

Application Number Title Priority Date Filing Date
GB12361/60A Expired GB918297A (en) 1960-04-07 1960-04-07 Improvements in electron microscopes

Country Status (5)

Country Link
US (1) US3155827A (en)
DE (1) DE1204350B (en)
FR (1) FR1285063A (en)
GB (1) GB918297A (en)
NL (1) NL263015A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0114765A2 (en) * 1983-01-14 1984-08-01 Cameca Process and device for the ion analysis of non-conducting specimen
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH451331A (en) * 1965-12-13 1968-05-15 Heinz Steigerwald Karl Electron beam generating system
CA935568A (en) * 1970-03-20 1973-10-16 Houtman Eliberthus Device for examining material by x-ray fluorescence
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE692336C (en) * 1934-12-07 1940-06-18 Bodo V Borries Dr Ing Process for the imaging of surfaces by means of corpuscular rays
US2356633A (en) * 1939-10-19 1944-08-22 Ardenne Manfred Von Electronic microscope
DE748680C (en) * 1939-10-19 1944-11-08 electron microscope
DE761663C (en) * 1942-01-21 1953-10-12 Aeg Electron microscope, in particular super microscope, with a projection lens acting as an electron mirror
DE893104C (en) * 1943-01-04 1953-10-12 Siemens Ag Device for transverse adjustment of the object in the beam path of corpuscular beam devices
NL98715C (en) * 1953-09-04
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
DE1133841B (en) * 1957-09-11 1962-07-26 Leitz Ernst Gmbh Electron microscope for the direct imaging of surfaces by secondary electrons, method for examining non-conductors or semiconductors and arrangement for carrying out the method
US3049618A (en) * 1959-05-13 1962-08-14 Commissariat Energie Atomique Methods and devices for performing spectrum analysis, in particular in the far ultraviolet region
DE1099102B (en) * 1959-05-26 1961-02-09 Siemens Ag Aperture arrangement for electron microscopes with additional equipment for X-ray spectroscopy of translucent preparations

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0114765A2 (en) * 1983-01-14 1984-08-01 Cameca Process and device for the ion analysis of non-conducting specimen
EP0114765A3 (en) * 1983-01-14 1984-08-29 Cameca Process and device for the ion analysis of non-conducting specimen
FR2542089A1 (en) * 1983-01-14 1984-09-07 Centre Nat Rech Scient METHOD AND DEVICE FOR THE IONIC ANALYSIS OF AN INSULATING SAMPLE
US4564758A (en) * 1984-02-01 1986-01-14 Cameca Process and device for the ionic analysis of an insulating sample

Also Published As

Publication number Publication date
DE1204350B (en) 1965-11-04
NL263015A (en) 1964-05-25
FR1285063A (en) 1962-02-16
US3155827A (en) 1964-11-03

Similar Documents

Publication Publication Date Title
US4211924A (en) Transmission-type scanning charged-particle beam microscope
US2257774A (en) Electronic-optical device
US5008537A (en) Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
US2372422A (en) Electron microanalyzer
US2418029A (en) Electron probe analysis employing X-ray spectrography
JPS6334588B2 (en)
US3732426A (en) X-ray source for generating an x-ray beam having selectable sectional shapes
DE2646472B2 (en) Transmission scanning electron microscope
GB918297A (en) Improvements in electron microscopes
GB2161018A (en) Electron microscope lenses
US2281325A (en) Electron microscope
US2330930A (en) Scanning type of electron microscope
GB1304344A (en)
US3534385A (en) Process and apparatus for micro-machining and treatment of materials
EP0401658A1 (en) Scanning tunneling microscope with arrangements for detecting electrons coming from the sample
Oatley et al. The development of the scanning electron microscope
US3696246A (en) Specimen analysis in an electron microscope
US2405306A (en) Electronic microanalyzer monitoring
US2348031A (en) Method of focusing electron microscopes
Mulvey Forty years of electron microscopy
US3446960A (en) Device for measuring electron-beam intensities and for subjecting materials to electron irradiation in an electron microscope
DE2640260A1 (en) RADIATION SCREEN BODY BEAM MICROSCOPE
GB899291A (en) An arrangement capable of being used as an electron microscope and for x-ray spectrometric examination
GB1025683A (en) Improvements in or relating to microanalyzers
US3078368A (en) Electron-diffracting device