JPS5258373A - Inspection for defects of pattern forming film - Google Patents
Inspection for defects of pattern forming filmInfo
- Publication number
- JPS5258373A JPS5258373A JP13384575A JP13384575A JPS5258373A JP S5258373 A JPS5258373 A JP S5258373A JP 13384575 A JP13384575 A JP 13384575A JP 13384575 A JP13384575 A JP 13384575A JP S5258373 A JPS5258373 A JP S5258373A
- Authority
- JP
- Japan
- Prior art keywords
- defects
- inspection
- pattern forming
- forming film
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3005—Observing the objects or the point of impact on the object
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Chemical Treatment Of Metals (AREA)
- ing And Chemical Polishing (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Abstract
PURPOSE:To detect the defects of a pattern film by scanning the film with electron beams and detecting the secondary electrons emitted from the film.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13384575A JPS5258373A (en) | 1975-11-07 | 1975-11-07 | Inspection for defects of pattern forming film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13384575A JPS5258373A (en) | 1975-11-07 | 1975-11-07 | Inspection for defects of pattern forming film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5258373A true JPS5258373A (en) | 1977-05-13 |
Family
ID=15114369
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13384575A Pending JPS5258373A (en) | 1975-11-07 | 1975-11-07 | Inspection for defects of pattern forming film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258373A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140230A (en) * | 1979-04-20 | 1980-11-01 | Hitachi Ltd | Pattern-correcting device |
JPS5637626A (en) * | 1979-09-05 | 1981-04-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Inspection device for pattern |
JPS56100416A (en) * | 1980-01-16 | 1981-08-12 | Fujitsu Ltd | Method and device for correcting mask |
JPS5961136A (en) * | 1982-09-30 | 1984-04-07 | Toshiba Corp | Mask defect inspecting device |
JPS59155941A (en) * | 1983-02-25 | 1984-09-05 | Hitachi Ltd | Electron-beam inspection device |
JPS62158450U (en) * | 1986-03-31 | 1987-10-08 | ||
JPH09213255A (en) * | 1997-01-20 | 1997-08-15 | Hitachi Ltd | Defect inspection device |
-
1975
- 1975-11-07 JP JP13384575A patent/JPS5258373A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55140230A (en) * | 1979-04-20 | 1980-11-01 | Hitachi Ltd | Pattern-correcting device |
JPS5637626A (en) * | 1979-09-05 | 1981-04-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Inspection device for pattern |
JPS56100416A (en) * | 1980-01-16 | 1981-08-12 | Fujitsu Ltd | Method and device for correcting mask |
JPS6217745B2 (en) * | 1980-01-16 | 1987-04-20 | Fujitsu Ltd | |
JPS5961136A (en) * | 1982-09-30 | 1984-04-07 | Toshiba Corp | Mask defect inspecting device |
JPS59155941A (en) * | 1983-02-25 | 1984-09-05 | Hitachi Ltd | Electron-beam inspection device |
JPH0563939B2 (en) * | 1983-02-25 | 1993-09-13 | Hitachi Ltd | |
JPS62158450U (en) * | 1986-03-31 | 1987-10-08 | ||
JPH09213255A (en) * | 1997-01-20 | 1997-08-15 | Hitachi Ltd | Defect inspection device |
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