JPS5421277A - Inspection method for pattern - Google Patents

Inspection method for pattern

Info

Publication number
JPS5421277A
JPS5421277A JP8686477A JP8686477A JPS5421277A JP S5421277 A JPS5421277 A JP S5421277A JP 8686477 A JP8686477 A JP 8686477A JP 8686477 A JP8686477 A JP 8686477A JP S5421277 A JPS5421277 A JP S5421277A
Authority
JP
Japan
Prior art keywords
pattern
inspection method
inspection
inspected
impossible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8686477A
Other languages
Japanese (ja)
Inventor
Toshihiko Yatsuhara
Tadao Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8686477A priority Critical patent/JPS5421277A/en
Publication of JPS5421277A publication Critical patent/JPS5421277A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To enable the fine pattern inspection which is impossible with optical inspection, by comparing the position signal at pattern formation to be inspected and the auger signal emitted with the projection electron beam to this pattern, and by detecting the difference between them.
COPYRIGHT: (C)1979,JPO&Japio
JP8686477A 1977-07-19 1977-07-19 Inspection method for pattern Pending JPS5421277A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8686477A JPS5421277A (en) 1977-07-19 1977-07-19 Inspection method for pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8686477A JPS5421277A (en) 1977-07-19 1977-07-19 Inspection method for pattern

Publications (1)

Publication Number Publication Date
JPS5421277A true JPS5421277A (en) 1979-02-17

Family

ID=13898673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8686477A Pending JPS5421277A (en) 1977-07-19 1977-07-19 Inspection method for pattern

Country Status (1)

Country Link
JP (1) JPS5421277A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683939A (en) * 1979-12-12 1981-07-08 Fujitsu Ltd Pattern testing process
JPS62218807A (en) * 1986-03-20 1987-09-26 Fujitsu Ltd Surface pattern inspection and election beam inspecting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683939A (en) * 1979-12-12 1981-07-08 Fujitsu Ltd Pattern testing process
JPS62218807A (en) * 1986-03-20 1987-09-26 Fujitsu Ltd Surface pattern inspection and election beam inspecting device

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