JPS5432231A - Detection system of pattern defect - Google Patents

Detection system of pattern defect

Info

Publication number
JPS5432231A
JPS5432231A JP9855777A JP9855777A JPS5432231A JP S5432231 A JPS5432231 A JP S5432231A JP 9855777 A JP9855777 A JP 9855777A JP 9855777 A JP9855777 A JP 9855777A JP S5432231 A JPS5432231 A JP S5432231A
Authority
JP
Japan
Prior art keywords
detection system
pattern defect
pattern
detection
inflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9855777A
Other languages
Japanese (ja)
Other versions
JPS5942904B2 (en
Inventor
Yoshiaki Goto
Masahito Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9855777A priority Critical patent/JPS5942904B2/en
Publication of JPS5432231A publication Critical patent/JPS5432231A/en
Publication of JPS5942904B2 publication Critical patent/JPS5942904B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To make easy for the detection of defective pattern, by comparing the characteristic points of pattern such as point of inflection within a given position permissible range.
COPYRIGHT: (C)1979,JPO&Japio
JP9855777A 1977-08-17 1977-08-17 Pattern defect detection method Expired JPS5942904B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9855777A JPS5942904B2 (en) 1977-08-17 1977-08-17 Pattern defect detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9855777A JPS5942904B2 (en) 1977-08-17 1977-08-17 Pattern defect detection method

Publications (2)

Publication Number Publication Date
JPS5432231A true JPS5432231A (en) 1979-03-09
JPS5942904B2 JPS5942904B2 (en) 1984-10-18

Family

ID=14222982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9855777A Expired JPS5942904B2 (en) 1977-08-17 1977-08-17 Pattern defect detection method

Country Status (1)

Country Link
JP (1) JPS5942904B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017038377A1 (en) * 2015-08-31 2017-03-09 株式会社 日立ハイテクノロジーズ Image processing apparatus for semiconductor pattern image

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017038377A1 (en) * 2015-08-31 2017-03-09 株式会社 日立ハイテクノロジーズ Image processing apparatus for semiconductor pattern image

Also Published As

Publication number Publication date
JPS5942904B2 (en) 1984-10-18

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