JPS5432231A - Detection system of pattern defect - Google Patents
Detection system of pattern defectInfo
- Publication number
- JPS5432231A JPS5432231A JP9855777A JP9855777A JPS5432231A JP S5432231 A JPS5432231 A JP S5432231A JP 9855777 A JP9855777 A JP 9855777A JP 9855777 A JP9855777 A JP 9855777A JP S5432231 A JPS5432231 A JP S5432231A
- Authority
- JP
- Japan
- Prior art keywords
- detection system
- pattern defect
- pattern
- detection
- inflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To make easy for the detection of defective pattern, by comparing the characteristic points of pattern such as point of inflection within a given position permissible range.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9855777A JPS5942904B2 (en) | 1977-08-17 | 1977-08-17 | Pattern defect detection method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9855777A JPS5942904B2 (en) | 1977-08-17 | 1977-08-17 | Pattern defect detection method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5432231A true JPS5432231A (en) | 1979-03-09 |
JPS5942904B2 JPS5942904B2 (en) | 1984-10-18 |
Family
ID=14222982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9855777A Expired JPS5942904B2 (en) | 1977-08-17 | 1977-08-17 | Pattern defect detection method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5942904B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017038377A1 (en) * | 2015-08-31 | 2017-03-09 | 株式会社 日立ハイテクノロジーズ | Image processing apparatus for semiconductor pattern image |
-
1977
- 1977-08-17 JP JP9855777A patent/JPS5942904B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017038377A1 (en) * | 2015-08-31 | 2017-03-09 | 株式会社 日立ハイテクノロジーズ | Image processing apparatus for semiconductor pattern image |
Also Published As
Publication number | Publication date |
---|---|
JPS5942904B2 (en) | 1984-10-18 |
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