JPS5385167A - Pattern inspecting system - Google Patents

Pattern inspecting system

Info

Publication number
JPS5385167A
JPS5385167A JP15805076A JP15805076A JPS5385167A JP S5385167 A JPS5385167 A JP S5385167A JP 15805076 A JP15805076 A JP 15805076A JP 15805076 A JP15805076 A JP 15805076A JP S5385167 A JPS5385167 A JP S5385167A
Authority
JP
Japan
Prior art keywords
inspecting system
pattern inspecting
inflection
pattern
superposes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15805076A
Other languages
Japanese (ja)
Inventor
Yoshiaki Goto
Yasuo Furukawa
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15805076A priority Critical patent/JPS5385167A/en
Publication of JPS5385167A publication Critical patent/JPS5385167A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE: To produce a defect signal when the direction of inflection superposes by extracting contour line information and inflection point information from the pattern informations obtainable by scanning the inside of square regions.
COPYRIGHT: (C)1978,JPO&Japio
JP15805076A 1976-12-31 1976-12-31 Pattern inspecting system Pending JPS5385167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15805076A JPS5385167A (en) 1976-12-31 1976-12-31 Pattern inspecting system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15805076A JPS5385167A (en) 1976-12-31 1976-12-31 Pattern inspecting system

Publications (1)

Publication Number Publication Date
JPS5385167A true JPS5385167A (en) 1978-07-27

Family

ID=15663186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15805076A Pending JPS5385167A (en) 1976-12-31 1976-12-31 Pattern inspecting system

Country Status (1)

Country Link
JP (1) JPS5385167A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512646A (en) * 1978-07-14 1980-01-29 Hitachi Ltd Auxiliary relay circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512646A (en) * 1978-07-14 1980-01-29 Hitachi Ltd Auxiliary relay circuit
JPS5816733B2 (en) * 1978-07-14 1983-04-01 株式会社日立製作所 Auxiliary relay circuit

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