JPS542073A - Alignment unit - Google Patents

Alignment unit

Info

Publication number
JPS542073A
JPS542073A JP6689777A JP6689777A JPS542073A JP S542073 A JPS542073 A JP S542073A JP 6689777 A JP6689777 A JP 6689777A JP 6689777 A JP6689777 A JP 6689777A JP S542073 A JPS542073 A JP S542073A
Authority
JP
Japan
Prior art keywords
alignment unit
alignment
signal
mask
establish
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6689777A
Other languages
Japanese (ja)
Inventor
Yuzo Kato
Ryozo Hiraga
Yasuo Ogino
Hideki Yoshinari
Masao Totsuka
Ichiro Kano
Akiyoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6689777A priority Critical patent/JPS542073A/en
Publication of JPS542073A publication Critical patent/JPS542073A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To establish an alignment unit which can detect the relative position between a mask and a substrate, even with a defect producing similar signal to the alignment signal on the scanning line.
COPYRIGHT: (C)1979,JPO&Japio
JP6689777A 1977-06-07 1977-06-07 Alignment unit Pending JPS542073A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6689777A JPS542073A (en) 1977-06-07 1977-06-07 Alignment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6689777A JPS542073A (en) 1977-06-07 1977-06-07 Alignment unit

Publications (1)

Publication Number Publication Date
JPS542073A true JPS542073A (en) 1979-01-09

Family

ID=13329167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6689777A Pending JPS542073A (en) 1977-06-07 1977-06-07 Alignment unit

Country Status (1)

Country Link
JP (1) JPS542073A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079800A (en) * 1983-10-06 1985-05-07 ローム株式会社 Electronic part removing device
JPS6079799U (en) * 1983-11-09 1985-06-03 日立電子エンジニアリング株式会社 IC feeding device in vertical conveyance path
JPS6164134A (en) * 1984-09-06 1986-04-02 Hitachi Electronics Eng Co Ltd Carrier device of electron parts
JPS62186499U (en) * 1986-05-20 1987-11-27

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079800A (en) * 1983-10-06 1985-05-07 ローム株式会社 Electronic part removing device
JPS6079799U (en) * 1983-11-09 1985-06-03 日立電子エンジニアリング株式会社 IC feeding device in vertical conveyance path
JPS6164134A (en) * 1984-09-06 1986-04-02 Hitachi Electronics Eng Co Ltd Carrier device of electron parts
JPH0340943B2 (en) * 1984-09-06 1991-06-20
JPS62186499U (en) * 1986-05-20 1987-11-27
JPH0311915Y2 (en) * 1986-05-20 1991-03-20

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