JPS542073A - Alignment unit - Google Patents
Alignment unitInfo
- Publication number
- JPS542073A JPS542073A JP6689777A JP6689777A JPS542073A JP S542073 A JPS542073 A JP S542073A JP 6689777 A JP6689777 A JP 6689777A JP 6689777 A JP6689777 A JP 6689777A JP S542073 A JPS542073 A JP S542073A
- Authority
- JP
- Japan
- Prior art keywords
- alignment unit
- alignment
- signal
- mask
- establish
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To establish an alignment unit which can detect the relative position between a mask and a substrate, even with a defect producing similar signal to the alignment signal on the scanning line.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6689777A JPS542073A (en) | 1977-06-07 | 1977-06-07 | Alignment unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6689777A JPS542073A (en) | 1977-06-07 | 1977-06-07 | Alignment unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS542073A true JPS542073A (en) | 1979-01-09 |
Family
ID=13329167
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6689777A Pending JPS542073A (en) | 1977-06-07 | 1977-06-07 | Alignment unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS542073A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6079800A (en) * | 1983-10-06 | 1985-05-07 | ローム株式会社 | Electronic part removing device |
JPS6079799U (en) * | 1983-11-09 | 1985-06-03 | 日立電子エンジニアリング株式会社 | IC feeding device in vertical conveyance path |
JPS6164134A (en) * | 1984-09-06 | 1986-04-02 | Hitachi Electronics Eng Co Ltd | Carrier device of electron parts |
JPS62186499U (en) * | 1986-05-20 | 1987-11-27 |
-
1977
- 1977-06-07 JP JP6689777A patent/JPS542073A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6079800A (en) * | 1983-10-06 | 1985-05-07 | ローム株式会社 | Electronic part removing device |
JPS6079799U (en) * | 1983-11-09 | 1985-06-03 | 日立電子エンジニアリング株式会社 | IC feeding device in vertical conveyance path |
JPS6164134A (en) * | 1984-09-06 | 1986-04-02 | Hitachi Electronics Eng Co Ltd | Carrier device of electron parts |
JPH0340943B2 (en) * | 1984-09-06 | 1991-06-20 | ||
JPS62186499U (en) * | 1986-05-20 | 1987-11-27 | ||
JPH0311915Y2 (en) * | 1986-05-20 | 1991-03-20 |
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