JPS5382451A - Method and apparatus of comparing and inspecting surface roughness - Google Patents

Method and apparatus of comparing and inspecting surface roughness

Info

Publication number
JPS5382451A
JPS5382451A JP15905976A JP15905976A JPS5382451A JP S5382451 A JPS5382451 A JP S5382451A JP 15905976 A JP15905976 A JP 15905976A JP 15905976 A JP15905976 A JP 15905976A JP S5382451 A JPS5382451 A JP S5382451A
Authority
JP
Japan
Prior art keywords
surface roughness
comparing
inspecting surface
distance
light receiving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15905976A
Other languages
Japanese (ja)
Other versions
JPS5635802B2 (en
Inventor
Toshimitsu Asakura
Hitoshi Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP15905976A priority Critical patent/JPS5382451A/en
Publication of JPS5382451A publication Critical patent/JPS5382451A/en
Publication of JPS5635802B2 publication Critical patent/JPS5635802B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To obtain the relationship between distance and light receiving intensity and detect surface roughness by changing the distance between an object and a light receiving surface.
COPYRIGHT: (C)1978,JPO&Japio
JP15905976A 1976-12-28 1976-12-28 Method and apparatus of comparing and inspecting surface roughness Granted JPS5382451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15905976A JPS5382451A (en) 1976-12-28 1976-12-28 Method and apparatus of comparing and inspecting surface roughness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15905976A JPS5382451A (en) 1976-12-28 1976-12-28 Method and apparatus of comparing and inspecting surface roughness

Publications (2)

Publication Number Publication Date
JPS5382451A true JPS5382451A (en) 1978-07-20
JPS5635802B2 JPS5635802B2 (en) 1981-08-20

Family

ID=15685313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15905976A Granted JPS5382451A (en) 1976-12-28 1976-12-28 Method and apparatus of comparing and inspecting surface roughness

Country Status (1)

Country Link
JP (1) JPS5382451A (en)

Also Published As

Publication number Publication date
JPS5635802B2 (en) 1981-08-20

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