JPS5362465A - Position detecting method of diffused layers provided in semiconductor - Google Patents

Position detecting method of diffused layers provided in semiconductor

Info

Publication number
JPS5362465A
JPS5362465A JP13730676A JP13730676A JPS5362465A JP S5362465 A JPS5362465 A JP S5362465A JP 13730676 A JP13730676 A JP 13730676A JP 13730676 A JP13730676 A JP 13730676A JP S5362465 A JPS5362465 A JP S5362465A
Authority
JP
Japan
Prior art keywords
diffused layers
semiconductor
position detecting
detecting method
layers provided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13730676A
Other languages
Japanese (ja)
Inventor
Shoji Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13730676A priority Critical patent/JPS5362465A/en
Publication of JPS5362465A publication Critical patent/JPS5362465A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To accurately detect the position of diffused layers by the intensity of the intensity of the reflected waves of microwaves from the diffused layers.
COPYRIGHT: (C)1978,JPO&Japio
JP13730676A 1976-11-17 1976-11-17 Position detecting method of diffused layers provided in semiconductor Pending JPS5362465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13730676A JPS5362465A (en) 1976-11-17 1976-11-17 Position detecting method of diffused layers provided in semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13730676A JPS5362465A (en) 1976-11-17 1976-11-17 Position detecting method of diffused layers provided in semiconductor

Publications (1)

Publication Number Publication Date
JPS5362465A true JPS5362465A (en) 1978-06-03

Family

ID=15195592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13730676A Pending JPS5362465A (en) 1976-11-17 1976-11-17 Position detecting method of diffused layers provided in semiconductor

Country Status (1)

Country Link
JP (1) JPS5362465A (en)

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