JPS53120552A - Evaluation method of plating surface - Google Patents

Evaluation method of plating surface

Info

Publication number
JPS53120552A
JPS53120552A JP3457177A JP3457177A JPS53120552A JP S53120552 A JPS53120552 A JP S53120552A JP 3457177 A JP3457177 A JP 3457177A JP 3457177 A JP3457177 A JP 3457177A JP S53120552 A JPS53120552 A JP S53120552A
Authority
JP
Japan
Prior art keywords
evaluation method
plating surface
rays
plating
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3457177A
Other languages
Japanese (ja)
Inventor
Hiroaki Okudaira
Toru Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3457177A priority Critical patent/JPS53120552A/en
Publication of JPS53120552A publication Critical patent/JPS53120552A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating And Analyzing Materials By Characteristic Methods (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: To improve the reliability of plating film evaluation and prevent the production of defects by measuring the intensity ratio of reflected rays of the plating films of specimen and standard piece respectively with rays of two different wavelengths.
COPYRIGHT: (C)1978,JPO&Japio
JP3457177A 1977-03-30 1977-03-30 Evaluation method of plating surface Pending JPS53120552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3457177A JPS53120552A (en) 1977-03-30 1977-03-30 Evaluation method of plating surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3457177A JPS53120552A (en) 1977-03-30 1977-03-30 Evaluation method of plating surface

Publications (1)

Publication Number Publication Date
JPS53120552A true JPS53120552A (en) 1978-10-21

Family

ID=12418005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3457177A Pending JPS53120552A (en) 1977-03-30 1977-03-30 Evaluation method of plating surface

Country Status (1)

Country Link
JP (1) JPS53120552A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62188965A (en) * 1986-02-14 1987-08-18 Kawasaki Steel Corp Reference sample for detection test of phosphor segregated part
JPS63156332A (en) * 1986-12-19 1988-06-29 Fujitsu Ltd Surface roughness evaluation of semiconductor crystal
JP2008157753A (en) * 2006-12-25 2008-07-10 Mitsubishi Electric Corp Inspection device, annealing device, and inspection method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62188965A (en) * 1986-02-14 1987-08-18 Kawasaki Steel Corp Reference sample for detection test of phosphor segregated part
JPS63156332A (en) * 1986-12-19 1988-06-29 Fujitsu Ltd Surface roughness evaluation of semiconductor crystal
JP2008157753A (en) * 2006-12-25 2008-07-10 Mitsubishi Electric Corp Inspection device, annealing device, and inspection method

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