JPS53120552A - Evaluation method of plating surface - Google Patents
Evaluation method of plating surfaceInfo
- Publication number
- JPS53120552A JPS53120552A JP3457177A JP3457177A JPS53120552A JP S53120552 A JPS53120552 A JP S53120552A JP 3457177 A JP3457177 A JP 3457177A JP 3457177 A JP3457177 A JP 3457177A JP S53120552 A JPS53120552 A JP S53120552A
- Authority
- JP
- Japan
- Prior art keywords
- evaluation method
- plating surface
- rays
- plating
- specimen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating And Analyzing Materials By Characteristic Methods (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
PURPOSE: To improve the reliability of plating film evaluation and prevent the production of defects by measuring the intensity ratio of reflected rays of the plating films of specimen and standard piece respectively with rays of two different wavelengths.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3457177A JPS53120552A (en) | 1977-03-30 | 1977-03-30 | Evaluation method of plating surface |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3457177A JPS53120552A (en) | 1977-03-30 | 1977-03-30 | Evaluation method of plating surface |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53120552A true JPS53120552A (en) | 1978-10-21 |
Family
ID=12418005
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3457177A Pending JPS53120552A (en) | 1977-03-30 | 1977-03-30 | Evaluation method of plating surface |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53120552A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62188965A (en) * | 1986-02-14 | 1987-08-18 | Kawasaki Steel Corp | Reference sample for detection test of phosphor segregated part |
JPS63156332A (en) * | 1986-12-19 | 1988-06-29 | Fujitsu Ltd | Surface roughness evaluation of semiconductor crystal |
JP2008157753A (en) * | 2006-12-25 | 2008-07-10 | Mitsubishi Electric Corp | Inspection device, annealing device, and inspection method |
-
1977
- 1977-03-30 JP JP3457177A patent/JPS53120552A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62188965A (en) * | 1986-02-14 | 1987-08-18 | Kawasaki Steel Corp | Reference sample for detection test of phosphor segregated part |
JPS63156332A (en) * | 1986-12-19 | 1988-06-29 | Fujitsu Ltd | Surface roughness evaluation of semiconductor crystal |
JP2008157753A (en) * | 2006-12-25 | 2008-07-10 | Mitsubishi Electric Corp | Inspection device, annealing device, and inspection method |
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