JPS52153468A - Thickness measuring method of substrates - Google Patents
Thickness measuring method of substratesInfo
- Publication number
- JPS52153468A JPS52153468A JP7011776A JP7011776A JPS52153468A JP S52153468 A JPS52153468 A JP S52153468A JP 7011776 A JP7011776 A JP 7011776A JP 7011776 A JP7011776 A JP 7011776A JP S52153468 A JPS52153468 A JP S52153468A
- Authority
- JP
- Japan
- Prior art keywords
- substrates
- measuring method
- thickness measuring
- photo detector
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To make possible the measurement of local thicknesses of substrates by detecting the scanning light of the light beams having passed through the substrate with a photo detector and assessing the levels of the signals corresponding to the quantity of the transmitted light from said photo detector.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7011776A JPS52153468A (en) | 1976-06-15 | 1976-06-15 | Thickness measuring method of substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7011776A JPS52153468A (en) | 1976-06-15 | 1976-06-15 | Thickness measuring method of substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52153468A true JPS52153468A (en) | 1977-12-20 |
Family
ID=13422274
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7011776A Pending JPS52153468A (en) | 1976-06-15 | 1976-06-15 | Thickness measuring method of substrates |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52153468A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58103604A (en) * | 1981-12-16 | 1983-06-20 | Teijin Ltd | Method and device for measuring thickness of film |
JPS5948605A (en) * | 1982-08-12 | 1984-03-19 | コンパニ−・アンデユストリエル・デ・テレコミユニカシオン・セイテ−アルカテル | Measuring device for thickness of film deposited on transparent substrate |
JPS59228105A (en) * | 1983-06-10 | 1984-12-21 | Teijin Ltd | Film-thickness measuring device |
JPS62245907A (en) * | 1986-04-18 | 1987-10-27 | Mitsutoyo Corp | Optical measuring instrument |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS508554A (en) * | 1973-05-19 | 1975-01-29 | ||
JPS5165687A (en) * | 1974-12-03 | 1976-06-07 | Hitachi Shipbuilding Eng Co | KAMIKOSEISOKUTEISOCHI |
-
1976
- 1976-06-15 JP JP7011776A patent/JPS52153468A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS508554A (en) * | 1973-05-19 | 1975-01-29 | ||
JPS5165687A (en) * | 1974-12-03 | 1976-06-07 | Hitachi Shipbuilding Eng Co | KAMIKOSEISOKUTEISOCHI |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58103604A (en) * | 1981-12-16 | 1983-06-20 | Teijin Ltd | Method and device for measuring thickness of film |
JPS5948605A (en) * | 1982-08-12 | 1984-03-19 | コンパニ−・アンデユストリエル・デ・テレコミユニカシオン・セイテ−アルカテル | Measuring device for thickness of film deposited on transparent substrate |
JPS59228105A (en) * | 1983-06-10 | 1984-12-21 | Teijin Ltd | Film-thickness measuring device |
JPH0519081B2 (en) * | 1983-06-10 | 1993-03-15 | Teijin Ltd | |
JPS62245907A (en) * | 1986-04-18 | 1987-10-27 | Mitsutoyo Corp | Optical measuring instrument |
JPH0449885B2 (en) * | 1986-04-18 | 1992-08-12 | Mitutoyo Corp |
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