JPS52153468A - Thickness measuring method of substrates - Google Patents

Thickness measuring method of substrates

Info

Publication number
JPS52153468A
JPS52153468A JP7011776A JP7011776A JPS52153468A JP S52153468 A JPS52153468 A JP S52153468A JP 7011776 A JP7011776 A JP 7011776A JP 7011776 A JP7011776 A JP 7011776A JP S52153468 A JPS52153468 A JP S52153468A
Authority
JP
Japan
Prior art keywords
substrates
measuring method
thickness measuring
photo detector
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7011776A
Other languages
Japanese (ja)
Inventor
Hiroyuki Ikeda
Katsumi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7011776A priority Critical patent/JPS52153468A/en
Publication of JPS52153468A publication Critical patent/JPS52153468A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To make possible the measurement of local thicknesses of substrates by detecting the scanning light of the light beams having passed through the substrate with a photo detector and assessing the levels of the signals corresponding to the quantity of the transmitted light from said photo detector.
COPYRIGHT: (C)1977,JPO&Japio
JP7011776A 1976-06-15 1976-06-15 Thickness measuring method of substrates Pending JPS52153468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7011776A JPS52153468A (en) 1976-06-15 1976-06-15 Thickness measuring method of substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7011776A JPS52153468A (en) 1976-06-15 1976-06-15 Thickness measuring method of substrates

Publications (1)

Publication Number Publication Date
JPS52153468A true JPS52153468A (en) 1977-12-20

Family

ID=13422274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7011776A Pending JPS52153468A (en) 1976-06-15 1976-06-15 Thickness measuring method of substrates

Country Status (1)

Country Link
JP (1) JPS52153468A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58103604A (en) * 1981-12-16 1983-06-20 Teijin Ltd Method and device for measuring thickness of film
JPS5948605A (en) * 1982-08-12 1984-03-19 コンパニ−・アンデユストリエル・デ・テレコミユニカシオン・セイテ−アルカテル Measuring device for thickness of film deposited on transparent substrate
JPS59228105A (en) * 1983-06-10 1984-12-21 Teijin Ltd Film-thickness measuring device
JPS62245907A (en) * 1986-04-18 1987-10-27 Mitsutoyo Corp Optical measuring instrument

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508554A (en) * 1973-05-19 1975-01-29
JPS5165687A (en) * 1974-12-03 1976-06-07 Hitachi Shipbuilding Eng Co KAMIKOSEISOKUTEISOCHI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508554A (en) * 1973-05-19 1975-01-29
JPS5165687A (en) * 1974-12-03 1976-06-07 Hitachi Shipbuilding Eng Co KAMIKOSEISOKUTEISOCHI

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58103604A (en) * 1981-12-16 1983-06-20 Teijin Ltd Method and device for measuring thickness of film
JPS5948605A (en) * 1982-08-12 1984-03-19 コンパニ−・アンデユストリエル・デ・テレコミユニカシオン・セイテ−アルカテル Measuring device for thickness of film deposited on transparent substrate
JPS59228105A (en) * 1983-06-10 1984-12-21 Teijin Ltd Film-thickness measuring device
JPH0519081B2 (en) * 1983-06-10 1993-03-15 Teijin Ltd
JPS62245907A (en) * 1986-04-18 1987-10-27 Mitsutoyo Corp Optical measuring instrument
JPH0449885B2 (en) * 1986-04-18 1992-08-12 Mitutoyo Corp

Similar Documents

Publication Publication Date Title
JPS533363A (en) Measurement method and measurement device
JPS52153468A (en) Thickness measuring method of substrates
JPS5355983A (en) Automatic micro defect detector
JPS5412488A (en) Method of detecting drum flange hole position
JPS5342762A (en) Radiation measuring apparatus
JPS52133284A (en) Probing device equipped with automatic inspection function
JPS523461A (en) Measuring, detecting and alarming device of land subsidence under a bu ilding
JPS52125387A (en) Surface flaw detecting method of hot steel materials
JPS53120552A (en) Evaluation method of plating surface
JPS5342881A (en) Measuring apparatus of leaked flowing amount
JPS5269653A (en) Detector for displacement of scanning beam
JPS5322759A (en) Thickness de tector of plate form objects
JPS52139365A (en) Measuring method for film thickness of vapor grown films in semiconductor wafers
JPS5342759A (en) Interference measuring method
JPS5399889A (en) Composite photo detector
JPS51122476A (en) Neutron detector
JPS5381151A (en) Surface film thickness detector
JPS5333193A (en) Measuring apparatus of transformed quantity at diffusion welding
JPS5421277A (en) Inspection method for pattern
JPS5396872A (en) Coating weight measuring method of powder
JPS52107857A (en) Film thickness measuring method
JPS5337499A (en) Measuring method for transient specific character of conveyance mechanism
JPS5391772A (en) Measurement apparatus
JPS5377651A (en) Compensating device of bridge circuit including photoelectric elemenats
JPS5262448A (en) Lens surface monitoring device of photoelectric instrument