JPS52107857A - Film thickness measuring method - Google Patents

Film thickness measuring method

Info

Publication number
JPS52107857A
JPS52107857A JP2331676A JP2331676A JPS52107857A JP S52107857 A JPS52107857 A JP S52107857A JP 2331676 A JP2331676 A JP 2331676A JP 2331676 A JP2331676 A JP 2331676A JP S52107857 A JPS52107857 A JP S52107857A
Authority
JP
Japan
Prior art keywords
film thickness
measuring method
thickness measuring
thin film
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2331676A
Other languages
Japanese (ja)
Inventor
Masao Honda
Hideo Sunami
Tetsukazu Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2331676A priority Critical patent/JPS52107857A/en
Publication of JPS52107857A publication Critical patent/JPS52107857A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To detect and measure a thickness of a thin film at in - Process, by utilizing and interference phenomenon of the light passing or reflecting a thin film when the thin film is formed on a base plate of a semiconductor.
COPYRIGHT: (C)1977,JPO&Japio
JP2331676A 1976-03-05 1976-03-05 Film thickness measuring method Pending JPS52107857A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2331676A JPS52107857A (en) 1976-03-05 1976-03-05 Film thickness measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2331676A JPS52107857A (en) 1976-03-05 1976-03-05 Film thickness measuring method

Publications (1)

Publication Number Publication Date
JPS52107857A true JPS52107857A (en) 1977-09-09

Family

ID=12107169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2331676A Pending JPS52107857A (en) 1976-03-05 1976-03-05 Film thickness measuring method

Country Status (1)

Country Link
JP (1) JPS52107857A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237308A (en) * 1984-05-11 1985-11-26 Toshiba Corp Depth measuring apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60237308A (en) * 1984-05-11 1985-11-26 Toshiba Corp Depth measuring apparatus

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