JPS5381151A - Surface film thickness detector - Google Patents

Surface film thickness detector

Info

Publication number
JPS5381151A
JPS5381151A JP15627876A JP15627876A JPS5381151A JP S5381151 A JPS5381151 A JP S5381151A JP 15627876 A JP15627876 A JP 15627876A JP 15627876 A JP15627876 A JP 15627876A JP S5381151 A JPS5381151 A JP S5381151A
Authority
JP
Japan
Prior art keywords
film thickness
surface film
thickness detector
test object
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15627876A
Other languages
Japanese (ja)
Inventor
Susumu Murata
Haruo Sabauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP15627876A priority Critical patent/JPS5381151A/en
Publication of JPS5381151A publication Critical patent/JPS5381151A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform the detection of surface film thickness of a continuously moving long-length test object by detecting the Fraunhofer diffracted images of laser light by the minute clearance formed between a fixed shading body and the test object.
COPYRIGHT: (C)1978,JPO&Japio
JP15627876A 1976-12-27 1976-12-27 Surface film thickness detector Pending JPS5381151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15627876A JPS5381151A (en) 1976-12-27 1976-12-27 Surface film thickness detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15627876A JPS5381151A (en) 1976-12-27 1976-12-27 Surface film thickness detector

Publications (1)

Publication Number Publication Date
JPS5381151A true JPS5381151A (en) 1978-07-18

Family

ID=15624311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15627876A Pending JPS5381151A (en) 1976-12-27 1976-12-27 Surface film thickness detector

Country Status (1)

Country Link
JP (1) JPS5381151A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH047305U (en) * 1990-05-02 1992-01-23
JPH074924A (en) * 1991-06-26 1995-01-10 Fumio Tojo On-line measuring apparatus of sheet thickness

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH047305U (en) * 1990-05-02 1992-01-23
JPH074924A (en) * 1991-06-26 1995-01-10 Fumio Tojo On-line measuring apparatus of sheet thickness

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