JPS52123646A - Scanning type length measuring apparatus - Google Patents

Scanning type length measuring apparatus

Info

Publication number
JPS52123646A
JPS52123646A JP4006976A JP4006976A JPS52123646A JP S52123646 A JPS52123646 A JP S52123646A JP 4006976 A JP4006976 A JP 4006976A JP 4006976 A JP4006976 A JP 4006976A JP S52123646 A JPS52123646 A JP S52123646A
Authority
JP
Japan
Prior art keywords
measuring apparatus
length measuring
scanning type
type length
subject surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4006976A
Other languages
Japanese (ja)
Other versions
JPS5824726B2 (en
Inventor
Sakae Miyauchi
Masaru Ohashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP51040069A priority Critical patent/JPS5824726B2/en
Publication of JPS52123646A publication Critical patent/JPS52123646A/en
Publication of JPS5824726B2 publication Critical patent/JPS5824726B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To display subject surface images and measure the length of lengthmeasuring patterns at sufficient accuracy and with ease by two-dimensionally scanning the subject surface having extremely fine length-measuring patterns with a charge particle beam.
COPYRIGHT: (C)1977,JPO&Japio
JP51040069A 1976-04-09 1976-04-09 Scanning length measuring device Expired JPS5824726B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51040069A JPS5824726B2 (en) 1976-04-09 1976-04-09 Scanning length measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51040069A JPS5824726B2 (en) 1976-04-09 1976-04-09 Scanning length measuring device

Publications (2)

Publication Number Publication Date
JPS52123646A true JPS52123646A (en) 1977-10-18
JPS5824726B2 JPS5824726B2 (en) 1983-05-23

Family

ID=12570629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51040069A Expired JPS5824726B2 (en) 1976-04-09 1976-04-09 Scanning length measuring device

Country Status (1)

Country Link
JP (1) JPS5824726B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57179256U (en) * 1981-05-09 1982-11-13

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6082238A (en) * 1983-10-07 1985-05-10 Nippon Alum Mfg Co Ltd:The Method of forming mouth piece structure
JPS6082237A (en) * 1983-10-07 1985-05-10 Toyo Seikan Kaisha Ltd Method and apparatus for manufacturing container member

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117656A (en) * 1976-03-29 1977-10-03 Hitachi Denshi Ltd Size measuring device for object

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52117656A (en) * 1976-03-29 1977-10-03 Hitachi Denshi Ltd Size measuring device for object

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57179256U (en) * 1981-05-09 1982-11-13

Also Published As

Publication number Publication date
JPS5824726B2 (en) 1983-05-23

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