JPS52123646A - Scanning type length measuring apparatus - Google Patents
Scanning type length measuring apparatusInfo
- Publication number
- JPS52123646A JPS52123646A JP4006976A JP4006976A JPS52123646A JP S52123646 A JPS52123646 A JP S52123646A JP 4006976 A JP4006976 A JP 4006976A JP 4006976 A JP4006976 A JP 4006976A JP S52123646 A JPS52123646 A JP S52123646A
- Authority
- JP
- Japan
- Prior art keywords
- measuring apparatus
- length measuring
- scanning type
- type length
- subject surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To display subject surface images and measure the length of lengthmeasuring patterns at sufficient accuracy and with ease by two-dimensionally scanning the subject surface having extremely fine length-measuring patterns with a charge particle beam.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51040069A JPS5824726B2 (en) | 1976-04-09 | 1976-04-09 | Scanning length measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51040069A JPS5824726B2 (en) | 1976-04-09 | 1976-04-09 | Scanning length measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52123646A true JPS52123646A (en) | 1977-10-18 |
JPS5824726B2 JPS5824726B2 (en) | 1983-05-23 |
Family
ID=12570629
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51040069A Expired JPS5824726B2 (en) | 1976-04-09 | 1976-04-09 | Scanning length measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5824726B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57179256U (en) * | 1981-05-09 | 1982-11-13 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6082238A (en) * | 1983-10-07 | 1985-05-10 | Nippon Alum Mfg Co Ltd:The | Method of forming mouth piece structure |
JPS6082237A (en) * | 1983-10-07 | 1985-05-10 | Toyo Seikan Kaisha Ltd | Method and apparatus for manufacturing container member |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52117656A (en) * | 1976-03-29 | 1977-10-03 | Hitachi Denshi Ltd | Size measuring device for object |
-
1976
- 1976-04-09 JP JP51040069A patent/JPS5824726B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52117656A (en) * | 1976-03-29 | 1977-10-03 | Hitachi Denshi Ltd | Size measuring device for object |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57179256U (en) * | 1981-05-09 | 1982-11-13 |
Also Published As
Publication number | Publication date |
---|---|
JPS5824726B2 (en) | 1983-05-23 |
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