JPS53106163A - Electron beam meter - Google Patents

Electron beam meter

Info

Publication number
JPS53106163A
JPS53106163A JP2137477A JP2137477A JPS53106163A JP S53106163 A JPS53106163 A JP S53106163A JP 2137477 A JP2137477 A JP 2137477A JP 2137477 A JP2137477 A JP 2137477A JP S53106163 A JPS53106163 A JP S53106163A
Authority
JP
Japan
Prior art keywords
electron beam
beam meter
meter
destance
enlarging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2137477A
Other languages
Japanese (ja)
Inventor
Mamoru Nakasuji
Tadahiro Takigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2137477A priority Critical patent/JPS53106163A/en
Publication of JPS53106163A publication Critical patent/JPS53106163A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To measure highly precisely the fine destance of an IC pattern or the like by enlarging the image, which is formed upon the scanning operation of a test piece with an electron beam supplied with a deflecting bias, so as to determine the distance between the points to be measured.
COPYRIGHT: (C)1978,JPO&Japio
JP2137477A 1977-02-28 1977-02-28 Electron beam meter Pending JPS53106163A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2137477A JPS53106163A (en) 1977-02-28 1977-02-28 Electron beam meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2137477A JPS53106163A (en) 1977-02-28 1977-02-28 Electron beam meter

Publications (1)

Publication Number Publication Date
JPS53106163A true JPS53106163A (en) 1978-09-14

Family

ID=12053311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2137477A Pending JPS53106163A (en) 1977-02-28 1977-02-28 Electron beam meter

Country Status (1)

Country Link
JP (1) JPS53106163A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114807A (en) * 1981-01-08 1982-07-16 Erionikusu:Kk Microdistance measuring device using electron beam
JPS6172613U (en) * 1984-10-19 1986-05-17
JPS6244390A (en) * 1985-08-19 1987-02-26 三菱電機株式会社 Industrial robot
JPS6288907U (en) * 1985-11-22 1987-06-06
JP2013185852A (en) * 2012-03-06 2013-09-19 Horon:Kk Apparatus and method for acquiring electron beam image

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57114807A (en) * 1981-01-08 1982-07-16 Erionikusu:Kk Microdistance measuring device using electron beam
JPS6172613U (en) * 1984-10-19 1986-05-17
JPH034884Y2 (en) * 1984-10-19 1991-02-07
JPS6244390A (en) * 1985-08-19 1987-02-26 三菱電機株式会社 Industrial robot
JPS6288907U (en) * 1985-11-22 1987-06-06
JP2013185852A (en) * 2012-03-06 2013-09-19 Horon:Kk Apparatus and method for acquiring electron beam image

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