JPS53106163A - Electron beam meter - Google Patents
Electron beam meterInfo
- Publication number
- JPS53106163A JPS53106163A JP2137477A JP2137477A JPS53106163A JP S53106163 A JPS53106163 A JP S53106163A JP 2137477 A JP2137477 A JP 2137477A JP 2137477 A JP2137477 A JP 2137477A JP S53106163 A JPS53106163 A JP S53106163A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam meter
- meter
- destance
- enlarging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To measure highly precisely the fine destance of an IC pattern or the like by enlarging the image, which is formed upon the scanning operation of a test piece with an electron beam supplied with a deflecting bias, so as to determine the distance between the points to be measured.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2137477A JPS53106163A (en) | 1977-02-28 | 1977-02-28 | Electron beam meter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2137477A JPS53106163A (en) | 1977-02-28 | 1977-02-28 | Electron beam meter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53106163A true JPS53106163A (en) | 1978-09-14 |
Family
ID=12053311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2137477A Pending JPS53106163A (en) | 1977-02-28 | 1977-02-28 | Electron beam meter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53106163A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57114807A (en) * | 1981-01-08 | 1982-07-16 | Erionikusu:Kk | Microdistance measuring device using electron beam |
JPS6172613U (en) * | 1984-10-19 | 1986-05-17 | ||
JPS6244390A (en) * | 1985-08-19 | 1987-02-26 | 三菱電機株式会社 | Industrial robot |
JPS6288907U (en) * | 1985-11-22 | 1987-06-06 | ||
JP2013185852A (en) * | 2012-03-06 | 2013-09-19 | Horon:Kk | Apparatus and method for acquiring electron beam image |
-
1977
- 1977-02-28 JP JP2137477A patent/JPS53106163A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57114807A (en) * | 1981-01-08 | 1982-07-16 | Erionikusu:Kk | Microdistance measuring device using electron beam |
JPS6172613U (en) * | 1984-10-19 | 1986-05-17 | ||
JPH034884Y2 (en) * | 1984-10-19 | 1991-02-07 | ||
JPS6244390A (en) * | 1985-08-19 | 1987-02-26 | 三菱電機株式会社 | Industrial robot |
JPS6288907U (en) * | 1985-11-22 | 1987-06-06 | ||
JP2013185852A (en) * | 2012-03-06 | 2013-09-19 | Horon:Kk | Apparatus and method for acquiring electron beam image |
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