JPS5266380A - Inspection of patterns - Google Patents

Inspection of patterns

Info

Publication number
JPS5266380A
JPS5266380A JP14310175A JP14310175A JPS5266380A JP S5266380 A JPS5266380 A JP S5266380A JP 14310175 A JP14310175 A JP 14310175A JP 14310175 A JP14310175 A JP 14310175A JP S5266380 A JPS5266380 A JP S5266380A
Authority
JP
Japan
Prior art keywords
patterns
inspection
levesl
establish
comparing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14310175A
Other languages
Japanese (ja)
Other versions
JPS5855657B2 (en
Inventor
Yasuo Furukawa
Yoshiaki Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP50143101A priority Critical patent/JPS5855657B2/en
Publication of JPS5266380A publication Critical patent/JPS5266380A/en
Publication of JPS5855657B2 publication Critical patent/JPS5855657B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To establish an inspecting method of minute patterns, by comparing both side levesl of secondary electronic signal output pulses discharged from the substrate surface by the electron beam.
COPYRIGHT: (C)1977,JPO&Japio
JP50143101A 1975-11-28 1975-11-28 Pattern Kensahouhou Expired JPS5855657B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50143101A JPS5855657B2 (en) 1975-11-28 1975-11-28 Pattern Kensahouhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50143101A JPS5855657B2 (en) 1975-11-28 1975-11-28 Pattern Kensahouhou

Publications (2)

Publication Number Publication Date
JPS5266380A true JPS5266380A (en) 1977-06-01
JPS5855657B2 JPS5855657B2 (en) 1983-12-10

Family

ID=15330922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50143101A Expired JPS5855657B2 (en) 1975-11-28 1975-11-28 Pattern Kensahouhou

Country Status (1)

Country Link
JP (1) JPS5855657B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58159342A (en) * 1982-03-17 1983-09-21 Mitsubishi Electric Corp Pattern defect detection for semiconductor element
JPS5911638A (en) * 1982-07-12 1984-01-21 Hitachi Ltd Device for detection of pattern defect

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58159342A (en) * 1982-03-17 1983-09-21 Mitsubishi Electric Corp Pattern defect detection for semiconductor element
JPS6222528B2 (en) * 1982-03-17 1987-05-19 Mitsubishi Electric Corp
JPS5911638A (en) * 1982-07-12 1984-01-21 Hitachi Ltd Device for detection of pattern defect
JPH0358178B2 (en) * 1982-07-12 1991-09-04 Hitachi Ltd

Also Published As

Publication number Publication date
JPS5855657B2 (en) 1983-12-10

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