JPS5266380A - Inspection of patterns - Google Patents
Inspection of patternsInfo
- Publication number
- JPS5266380A JPS5266380A JP14310175A JP14310175A JPS5266380A JP S5266380 A JPS5266380 A JP S5266380A JP 14310175 A JP14310175 A JP 14310175A JP 14310175 A JP14310175 A JP 14310175A JP S5266380 A JPS5266380 A JP S5266380A
- Authority
- JP
- Japan
- Prior art keywords
- patterns
- inspection
- levesl
- establish
- comparing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To establish an inspecting method of minute patterns, by comparing both side levesl of secondary electronic signal output pulses discharged from the substrate surface by the electron beam.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50143101A JPS5855657B2 (en) | 1975-11-28 | 1975-11-28 | Pattern Kensahouhou |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50143101A JPS5855657B2 (en) | 1975-11-28 | 1975-11-28 | Pattern Kensahouhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5266380A true JPS5266380A (en) | 1977-06-01 |
JPS5855657B2 JPS5855657B2 (en) | 1983-12-10 |
Family
ID=15330922
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50143101A Expired JPS5855657B2 (en) | 1975-11-28 | 1975-11-28 | Pattern Kensahouhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5855657B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58159342A (en) * | 1982-03-17 | 1983-09-21 | Mitsubishi Electric Corp | Pattern defect detection for semiconductor element |
JPS5911638A (en) * | 1982-07-12 | 1984-01-21 | Hitachi Ltd | Device for detection of pattern defect |
-
1975
- 1975-11-28 JP JP50143101A patent/JPS5855657B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58159342A (en) * | 1982-03-17 | 1983-09-21 | Mitsubishi Electric Corp | Pattern defect detection for semiconductor element |
JPS6222528B2 (en) * | 1982-03-17 | 1987-05-19 | Mitsubishi Electric Corp | |
JPS5911638A (en) * | 1982-07-12 | 1984-01-21 | Hitachi Ltd | Device for detection of pattern defect |
JPH0358178B2 (en) * | 1982-07-12 | 1991-09-04 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5855657B2 (en) | 1983-12-10 |
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