JPS52119183A - Electron beam exposure equipment - Google Patents
Electron beam exposure equipmentInfo
- Publication number
- JPS52119183A JPS52119183A JP3647176A JP3647176A JPS52119183A JP S52119183 A JPS52119183 A JP S52119183A JP 3647176 A JP3647176 A JP 3647176A JP 3647176 A JP3647176 A JP 3647176A JP S52119183 A JPS52119183 A JP S52119183A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam exposure
- exposure equipment
- decides
- enable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enable the high precision and rapid detection of the exposed position by providing the memorizing method that adjust the detected signal obtained by repeatedly scanning within the unit time and the position detection method that decides the pattern position with the peak position of the signal waveform to be read out.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3647176A JPS52119183A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3647176A JPS52119183A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52119183A true JPS52119183A (en) | 1977-10-06 |
Family
ID=12470720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3647176A Pending JPS52119183A (en) | 1976-03-31 | 1976-03-31 | Electron beam exposure equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52119183A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57106130A (en) * | 1980-12-24 | 1982-07-01 | Jeol Ltd | Detecting method for mark |
-
1976
- 1976-03-31 JP JP3647176A patent/JPS52119183A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57106130A (en) * | 1980-12-24 | 1982-07-01 | Jeol Ltd | Detecting method for mark |
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