JPS52119183A - Electron beam exposure equipment - Google Patents

Electron beam exposure equipment

Info

Publication number
JPS52119183A
JPS52119183A JP3647176A JP3647176A JPS52119183A JP S52119183 A JPS52119183 A JP S52119183A JP 3647176 A JP3647176 A JP 3647176A JP 3647176 A JP3647176 A JP 3647176A JP S52119183 A JPS52119183 A JP S52119183A
Authority
JP
Japan
Prior art keywords
electron beam
beam exposure
exposure equipment
decides
enable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3647176A
Other languages
Japanese (ja)
Inventor
Hiroshi Yasuda
Haruo Tsuchikawa
Yasutaka Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3647176A priority Critical patent/JPS52119183A/en
Publication of JPS52119183A publication Critical patent/JPS52119183A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To enable the high precision and rapid detection of the exposed position by providing the memorizing method that adjust the detected signal obtained by repeatedly scanning within the unit time and the position detection method that decides the pattern position with the peak position of the signal waveform to be read out.
COPYRIGHT: (C)1977,JPO&Japio
JP3647176A 1976-03-31 1976-03-31 Electron beam exposure equipment Pending JPS52119183A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3647176A JPS52119183A (en) 1976-03-31 1976-03-31 Electron beam exposure equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3647176A JPS52119183A (en) 1976-03-31 1976-03-31 Electron beam exposure equipment

Publications (1)

Publication Number Publication Date
JPS52119183A true JPS52119183A (en) 1977-10-06

Family

ID=12470720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3647176A Pending JPS52119183A (en) 1976-03-31 1976-03-31 Electron beam exposure equipment

Country Status (1)

Country Link
JP (1) JPS52119183A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106130A (en) * 1980-12-24 1982-07-01 Jeol Ltd Detecting method for mark

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57106130A (en) * 1980-12-24 1982-07-01 Jeol Ltd Detecting method for mark

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