JPS5251862A - Scanning micro-probe equipment - Google Patents
Scanning micro-probe equipmentInfo
- Publication number
- JPS5251862A JPS5251862A JP12690475A JP12690475A JPS5251862A JP S5251862 A JPS5251862 A JP S5251862A JP 12690475 A JP12690475 A JP 12690475A JP 12690475 A JP12690475 A JP 12690475A JP S5251862 A JPS5251862 A JP S5251862A
- Authority
- JP
- Japan
- Prior art keywords
- scanning micro
- probe equipment
- probe
- equipment
- beam duration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
PURPOSE: The beam duration of probe is measured in its scanning direction by use of knife-edge method, and luminance signal equivalent to the beam duration is displayed on CRT. In this way, function of the equipment can be increased as well as correct confirmation of focus matching can be secured.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12690475A JPS5251862A (en) | 1975-10-23 | 1975-10-23 | Scanning micro-probe equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12690475A JPS5251862A (en) | 1975-10-23 | 1975-10-23 | Scanning micro-probe equipment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5251862A true JPS5251862A (en) | 1977-04-26 |
Family
ID=14946756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12690475A Pending JPS5251862A (en) | 1975-10-23 | 1975-10-23 | Scanning micro-probe equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5251862A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1072104C (en) * | 1995-12-31 | 2001-10-03 | 株式会社新兴塞尔比克 | Moldless molding method using no mold and apparatus therefor |
-
1975
- 1975-10-23 JP JP12690475A patent/JPS5251862A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1072104C (en) * | 1995-12-31 | 2001-10-03 | 株式会社新兴塞尔比克 | Moldless molding method using no mold and apparatus therefor |
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