JPS5251862A - Scanning micro-probe equipment - Google Patents

Scanning micro-probe equipment

Info

Publication number
JPS5251862A
JPS5251862A JP12690475A JP12690475A JPS5251862A JP S5251862 A JPS5251862 A JP S5251862A JP 12690475 A JP12690475 A JP 12690475A JP 12690475 A JP12690475 A JP 12690475A JP S5251862 A JPS5251862 A JP S5251862A
Authority
JP
Japan
Prior art keywords
scanning micro
probe equipment
probe
equipment
beam duration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12690475A
Other languages
Japanese (ja)
Inventor
Takashi Nagatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12690475A priority Critical patent/JPS5251862A/en
Publication of JPS5251862A publication Critical patent/JPS5251862A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: The beam duration of probe is measured in its scanning direction by use of knife-edge method, and luminance signal equivalent to the beam duration is displayed on CRT. In this way, function of the equipment can be increased as well as correct confirmation of focus matching can be secured.
COPYRIGHT: (C)1977,JPO&Japio
JP12690475A 1975-10-23 1975-10-23 Scanning micro-probe equipment Pending JPS5251862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12690475A JPS5251862A (en) 1975-10-23 1975-10-23 Scanning micro-probe equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12690475A JPS5251862A (en) 1975-10-23 1975-10-23 Scanning micro-probe equipment

Publications (1)

Publication Number Publication Date
JPS5251862A true JPS5251862A (en) 1977-04-26

Family

ID=14946756

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12690475A Pending JPS5251862A (en) 1975-10-23 1975-10-23 Scanning micro-probe equipment

Country Status (1)

Country Link
JP (1) JPS5251862A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1072104C (en) * 1995-12-31 2001-10-03 株式会社新兴塞尔比克 Moldless molding method using no mold and apparatus therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1072104C (en) * 1995-12-31 2001-10-03 株式会社新兴塞尔比克 Moldless molding method using no mold and apparatus therefor

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