JPS5364547A - Electron beam spot shape measuring apparatus - Google Patents
Electron beam spot shape measuring apparatusInfo
- Publication number
- JPS5364547A JPS5364547A JP13955576A JP13955576A JPS5364547A JP S5364547 A JPS5364547 A JP S5364547A JP 13955576 A JP13955576 A JP 13955576A JP 13955576 A JP13955576 A JP 13955576A JP S5364547 A JPS5364547 A JP S5364547A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- measuring apparatus
- beam spot
- shape measuring
- spot shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Radiation (AREA)
Abstract
PURPOSE: To make measurement of the shapes of the electron beam spots of arbitrary shapes by performing multidirectional scanning of the electron beam.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13955576A JPS5364547A (en) | 1976-11-22 | 1976-11-22 | Electron beam spot shape measuring apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13955576A JPS5364547A (en) | 1976-11-22 | 1976-11-22 | Electron beam spot shape measuring apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5364547A true JPS5364547A (en) | 1978-06-09 |
Family
ID=15247981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13955576A Pending JPS5364547A (en) | 1976-11-22 | 1976-11-22 | Electron beam spot shape measuring apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5364547A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019007072A (en) * | 2017-06-28 | 2019-01-17 | 株式会社アドバンテスト | Three-dimensional laminated modeling apparatus and radiation position deviation detection method therefor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50144551A (en) * | 1974-05-13 | 1975-11-20 |
-
1976
- 1976-11-22 JP JP13955576A patent/JPS5364547A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50144551A (en) * | 1974-05-13 | 1975-11-20 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019007072A (en) * | 2017-06-28 | 2019-01-17 | 株式会社アドバンテスト | Three-dimensional laminated modeling apparatus and radiation position deviation detection method therefor |
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