JPS5364547A - Electron beam spot shape measuring apparatus - Google Patents

Electron beam spot shape measuring apparatus

Info

Publication number
JPS5364547A
JPS5364547A JP13955576A JP13955576A JPS5364547A JP S5364547 A JPS5364547 A JP S5364547A JP 13955576 A JP13955576 A JP 13955576A JP 13955576 A JP13955576 A JP 13955576A JP S5364547 A JPS5364547 A JP S5364547A
Authority
JP
Japan
Prior art keywords
electron beam
measuring apparatus
beam spot
shape measuring
spot shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13955576A
Other languages
Japanese (ja)
Inventor
Tsuneo Okubo
Akihira Fujinami
Atsushi Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13955576A priority Critical patent/JPS5364547A/en
Publication of JPS5364547A publication Critical patent/JPS5364547A/en
Pending legal-status Critical Current

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  • Measurement Of Radiation (AREA)

Abstract

PURPOSE: To make measurement of the shapes of the electron beam spots of arbitrary shapes by performing multidirectional scanning of the electron beam.
COPYRIGHT: (C)1978,JPO&Japio
JP13955576A 1976-11-22 1976-11-22 Electron beam spot shape measuring apparatus Pending JPS5364547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13955576A JPS5364547A (en) 1976-11-22 1976-11-22 Electron beam spot shape measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13955576A JPS5364547A (en) 1976-11-22 1976-11-22 Electron beam spot shape measuring apparatus

Publications (1)

Publication Number Publication Date
JPS5364547A true JPS5364547A (en) 1978-06-09

Family

ID=15247981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13955576A Pending JPS5364547A (en) 1976-11-22 1976-11-22 Electron beam spot shape measuring apparatus

Country Status (1)

Country Link
JP (1) JPS5364547A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019007072A (en) * 2017-06-28 2019-01-17 株式会社アドバンテスト Three-dimensional laminated modeling apparatus and radiation position deviation detection method therefor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50144551A (en) * 1974-05-13 1975-11-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50144551A (en) * 1974-05-13 1975-11-20

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019007072A (en) * 2017-06-28 2019-01-17 株式会社アドバンテスト Three-dimensional laminated modeling apparatus and radiation position deviation detection method therefor

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