JPS522573A - Surface potential measuring device - Google Patents

Surface potential measuring device

Info

Publication number
JPS522573A
JPS522573A JP50078085A JP7808575A JPS522573A JP S522573 A JPS522573 A JP S522573A JP 50078085 A JP50078085 A JP 50078085A JP 7808575 A JP7808575 A JP 7808575A JP S522573 A JPS522573 A JP S522573A
Authority
JP
Japan
Prior art keywords
measuring device
surface potential
potential measuring
ultra
contacting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50078085A
Other languages
Japanese (ja)
Inventor
Tai Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50078085A priority Critical patent/JPS522573A/en
Publication of JPS522573A publication Critical patent/JPS522573A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Measuring device using ultra-violet beam which gives surface electric rotational of minute area without contacting it.
COPYRIGHT: (C)1977,JPO&Japio
JP50078085A 1975-06-24 1975-06-24 Surface potential measuring device Pending JPS522573A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50078085A JPS522573A (en) 1975-06-24 1975-06-24 Surface potential measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50078085A JPS522573A (en) 1975-06-24 1975-06-24 Surface potential measuring device

Publications (1)

Publication Number Publication Date
JPS522573A true JPS522573A (en) 1977-01-10

Family

ID=13651996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50078085A Pending JPS522573A (en) 1975-06-24 1975-06-24 Surface potential measuring device

Country Status (1)

Country Link
JP (1) JPS522573A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61108148A (en) * 1984-11-01 1986-05-26 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Dynamic tester for intermediate body during the manufacture of ic
JPS61225831A (en) * 1985-03-29 1986-10-07 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Non-contact total line dynamic tester
JPS6269630A (en) * 1985-09-23 1987-03-30 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Testing device for integrated circuit
JPH0573579U (en) * 1991-05-31 1993-10-08 インターナショナル・ビジネス・マシーンズ・コーポレイション Dynamic test equipment for intermediates during integrated circuit manufacturing

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61108148A (en) * 1984-11-01 1986-05-26 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Dynamic tester for intermediate body during the manufacture of ic
JPS61225831A (en) * 1985-03-29 1986-10-07 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Non-contact total line dynamic tester
JPH0428138B2 (en) * 1985-03-29 1992-05-13 Intaanashonaru Bijinesu Mashiinzu Corp
JPS6269630A (en) * 1985-09-23 1987-03-30 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Testing device for integrated circuit
JPH0337301B2 (en) * 1985-09-23 1991-06-05 Intaanashonaru Bijinesu Mashiinzu Corp
JPH0573579U (en) * 1991-05-31 1993-10-08 インターナショナル・ビジネス・マシーンズ・コーポレイション Dynamic test equipment for intermediates during integrated circuit manufacturing

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