JPS53117465A - Method and apparatus of measuring surface roughness - Google Patents

Method and apparatus of measuring surface roughness

Info

Publication number
JPS53117465A
JPS53117465A JP3243477A JP3243477A JPS53117465A JP S53117465 A JPS53117465 A JP S53117465A JP 3243477 A JP3243477 A JP 3243477A JP 3243477 A JP3243477 A JP 3243477A JP S53117465 A JPS53117465 A JP S53117465A
Authority
JP
Japan
Prior art keywords
surface roughness
measuring surface
measured
maximum value
speckle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3243477A
Other languages
Japanese (ja)
Other versions
JPS5735767B2 (en
Inventor
Toshimitsu Asakura
Hitoshi Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP3243477A priority Critical patent/JPS53117465A/en
Publication of JPS53117465A publication Critical patent/JPS53117465A/en
Publication of JPS5735767B2 publication Critical patent/JPS5735767B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure the absolute value of the roughness of the surface to be measured from the maximum value of the mean contrast of speckle patters by changing the radiation area of coherent light on the surface to be measured and obtaining the maximum value of the mean contrast of the speckle patterns based on the change thereof.
COPYRIGHT: (C)1978,JPO&Japio
JP3243477A 1977-03-23 1977-03-23 Method and apparatus of measuring surface roughness Granted JPS53117465A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3243477A JPS53117465A (en) 1977-03-23 1977-03-23 Method and apparatus of measuring surface roughness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3243477A JPS53117465A (en) 1977-03-23 1977-03-23 Method and apparatus of measuring surface roughness

Publications (2)

Publication Number Publication Date
JPS53117465A true JPS53117465A (en) 1978-10-13
JPS5735767B2 JPS5735767B2 (en) 1982-07-30

Family

ID=12358835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3243477A Granted JPS53117465A (en) 1977-03-23 1977-03-23 Method and apparatus of measuring surface roughness

Country Status (1)

Country Link
JP (1) JPS53117465A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014032371A (en) * 2012-08-06 2014-02-20 Oxide Corp Speckle contrast generator and speckle contrast evaluation device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0437649Y2 (en) * 1985-11-25 1992-09-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014032371A (en) * 2012-08-06 2014-02-20 Oxide Corp Speckle contrast generator and speckle contrast evaluation device

Also Published As

Publication number Publication date
JPS5735767B2 (en) 1982-07-30

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