JPS5417872A - Depth measuring method of fine patterns - Google Patents
Depth measuring method of fine patternsInfo
- Publication number
- JPS5417872A JPS5417872A JP8331577A JP8331577A JPS5417872A JP S5417872 A JPS5417872 A JP S5417872A JP 8331577 A JP8331577 A JP 8331577A JP 8331577 A JP8331577 A JP 8331577A JP S5417872 A JPS5417872 A JP S5417872A
- Authority
- JP
- Japan
- Prior art keywords
- fine patterns
- measuring method
- depth measuring
- light
- reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To measure the depth of fine patterns from the maximum or minimum value of the intensity of reflected or transmitted light by measuring the intensity of the reflected or transmitted light obtainable from the light radiated onto the fine patterns by making use of the interference phenomena of light.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8331577A JPS5417872A (en) | 1977-07-11 | 1977-07-11 | Depth measuring method of fine patterns |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8331577A JPS5417872A (en) | 1977-07-11 | 1977-07-11 | Depth measuring method of fine patterns |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5417872A true JPS5417872A (en) | 1979-02-09 |
Family
ID=13798980
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8331577A Pending JPS5417872A (en) | 1977-07-11 | 1977-07-11 | Depth measuring method of fine patterns |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5417872A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4615620A (en) * | 1983-12-26 | 1986-10-07 | Hitachi, Ltd. | Apparatus for measuring the depth of fine engraved patterns |
US4744660A (en) * | 1985-04-12 | 1988-05-17 | Hitachi, Ltd. | Apparatus for measuring difference in shallow level |
USRE33424E (en) * | 1983-12-26 | 1990-11-06 | Hitachi, Ltd. | Apparatus and method for measuring the depth of fine engraved patterns |
-
1977
- 1977-07-11 JP JP8331577A patent/JPS5417872A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4615620A (en) * | 1983-12-26 | 1986-10-07 | Hitachi, Ltd. | Apparatus for measuring the depth of fine engraved patterns |
USRE33424E (en) * | 1983-12-26 | 1990-11-06 | Hitachi, Ltd. | Apparatus and method for measuring the depth of fine engraved patterns |
US4744660A (en) * | 1985-04-12 | 1988-05-17 | Hitachi, Ltd. | Apparatus for measuring difference in shallow level |
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