JPS5417872A - Depth measuring method of fine patterns - Google Patents

Depth measuring method of fine patterns

Info

Publication number
JPS5417872A
JPS5417872A JP8331577A JP8331577A JPS5417872A JP S5417872 A JPS5417872 A JP S5417872A JP 8331577 A JP8331577 A JP 8331577A JP 8331577 A JP8331577 A JP 8331577A JP S5417872 A JPS5417872 A JP S5417872A
Authority
JP
Japan
Prior art keywords
fine patterns
measuring method
depth measuring
light
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8331577A
Other languages
Japanese (ja)
Inventor
Toshio Yada
Atsushi Endo
Yuri Shima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8331577A priority Critical patent/JPS5417872A/en
Publication of JPS5417872A publication Critical patent/JPS5417872A/en
Pending legal-status Critical Current

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Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure the depth of fine patterns from the maximum or minimum value of the intensity of reflected or transmitted light by measuring the intensity of the reflected or transmitted light obtainable from the light radiated onto the fine patterns by making use of the interference phenomena of light.
COPYRIGHT: (C)1979,JPO&Japio
JP8331577A 1977-07-11 1977-07-11 Depth measuring method of fine patterns Pending JPS5417872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8331577A JPS5417872A (en) 1977-07-11 1977-07-11 Depth measuring method of fine patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8331577A JPS5417872A (en) 1977-07-11 1977-07-11 Depth measuring method of fine patterns

Publications (1)

Publication Number Publication Date
JPS5417872A true JPS5417872A (en) 1979-02-09

Family

ID=13798980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8331577A Pending JPS5417872A (en) 1977-07-11 1977-07-11 Depth measuring method of fine patterns

Country Status (1)

Country Link
JP (1) JPS5417872A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4615620A (en) * 1983-12-26 1986-10-07 Hitachi, Ltd. Apparatus for measuring the depth of fine engraved patterns
US4744660A (en) * 1985-04-12 1988-05-17 Hitachi, Ltd. Apparatus for measuring difference in shallow level
USRE33424E (en) * 1983-12-26 1990-11-06 Hitachi, Ltd. Apparatus and method for measuring the depth of fine engraved patterns

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4615620A (en) * 1983-12-26 1986-10-07 Hitachi, Ltd. Apparatus for measuring the depth of fine engraved patterns
USRE33424E (en) * 1983-12-26 1990-11-06 Hitachi, Ltd. Apparatus and method for measuring the depth of fine engraved patterns
US4744660A (en) * 1985-04-12 1988-05-17 Hitachi, Ltd. Apparatus for measuring difference in shallow level

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