JPS52117575A - Electronic gun for electronic beam exposure unit - Google Patents
Electronic gun for electronic beam exposure unitInfo
- Publication number
- JPS52117575A JPS52117575A JP3418376A JP3418376A JPS52117575A JP S52117575 A JPS52117575 A JP S52117575A JP 3418376 A JP3418376 A JP 3418376A JP 3418376 A JP3418376 A JP 3418376A JP S52117575 A JPS52117575 A JP S52117575A
- Authority
- JP
- Japan
- Prior art keywords
- electronic
- exposure unit
- beam exposure
- gun
- electronic beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To achieve exposure with no proximity effect received by forming electronic beam featuring intensity profile.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3418376A JPS52117575A (en) | 1976-03-30 | 1976-03-30 | Electronic gun for electronic beam exposure unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3418376A JPS52117575A (en) | 1976-03-30 | 1976-03-30 | Electronic gun for electronic beam exposure unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117575A true JPS52117575A (en) | 1977-10-03 |
Family
ID=12407073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3418376A Pending JPS52117575A (en) | 1976-03-30 | 1976-03-30 | Electronic gun for electronic beam exposure unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117575A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55131946A (en) * | 1979-03-31 | 1980-10-14 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electron gun |
-
1976
- 1976-03-30 JP JP3418376A patent/JPS52117575A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55131946A (en) * | 1979-03-31 | 1980-10-14 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electron gun |
JPS6343859B2 (en) * | 1979-03-31 | 1988-09-01 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai |
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