JPS51124454A - Surface coarseness measuring method and equipment - Google Patents

Surface coarseness measuring method and equipment

Info

Publication number
JPS51124454A
JPS51124454A JP4936975A JP4936975A JPS51124454A JP S51124454 A JPS51124454 A JP S51124454A JP 4936975 A JP4936975 A JP 4936975A JP 4936975 A JP4936975 A JP 4936975A JP S51124454 A JPS51124454 A JP S51124454A
Authority
JP
Japan
Prior art keywords
measuring method
surface coarseness
equipment
coarseness measuring
highly accurate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4936975A
Other languages
Japanese (ja)
Inventor
Toshimitsu Asakura
Hitoshi Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimadzu Seisakusho Ltd
Original Assignee
Shimadzu Corp
Shimadzu Seisakusho Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimadzu Seisakusho Ltd filed Critical Shimadzu Corp
Priority to JP4936975A priority Critical patent/JPS51124454A/en
Publication of JPS51124454A publication Critical patent/JPS51124454A/en
Pending legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: A highly accurate surface coarseness measuring method to measure surface coarseness by speckle pattern produced by coherent light.
COPYRIGHT: (C)1976,JPO&Japio
JP4936975A 1975-04-22 1975-04-22 Surface coarseness measuring method and equipment Pending JPS51124454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4936975A JPS51124454A (en) 1975-04-22 1975-04-22 Surface coarseness measuring method and equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4936975A JPS51124454A (en) 1975-04-22 1975-04-22 Surface coarseness measuring method and equipment

Publications (1)

Publication Number Publication Date
JPS51124454A true JPS51124454A (en) 1976-10-29

Family

ID=12829098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4936975A Pending JPS51124454A (en) 1975-04-22 1975-04-22 Surface coarseness measuring method and equipment

Country Status (1)

Country Link
JP (1) JPS51124454A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2270517A1 (en) 2009-07-01 2011-01-05 Canon Kabushiki Kaisha Optical device for measuring displacement or speed
JP2014032371A (en) * 2012-08-06 2014-02-20 Oxide Corp Speckle contrast generator and speckle contrast evaluation device
JP2016075650A (en) * 2014-10-09 2016-05-12 株式会社フジエンジニアリング Surface cleanness determination device and surface cleanness determination program

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
APPLIED OPTICS#V11#N12=1972 *
NOUVELLE REVUE D'OPTIQUE#V6#N1=S50 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2270517A1 (en) 2009-07-01 2011-01-05 Canon Kabushiki Kaisha Optical device for measuring displacement or speed
JP2014032371A (en) * 2012-08-06 2014-02-20 Oxide Corp Speckle contrast generator and speckle contrast evaluation device
JP2016075650A (en) * 2014-10-09 2016-05-12 株式会社フジエンジニアリング Surface cleanness determination device and surface cleanness determination program

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