JPS5320866A - Relative position deviation observing apparatus of patterns - Google Patents

Relative position deviation observing apparatus of patterns

Info

Publication number
JPS5320866A
JPS5320866A JP9489176A JP9489176A JPS5320866A JP S5320866 A JPS5320866 A JP S5320866A JP 9489176 A JP9489176 A JP 9489176A JP 9489176 A JP9489176 A JP 9489176A JP S5320866 A JPS5320866 A JP S5320866A
Authority
JP
Japan
Prior art keywords
patterns
relative position
position deviation
observing apparatus
deviation observing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9489176A
Other languages
Japanese (ja)
Inventor
Minoru Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9489176A priority Critical patent/JPS5320866A/en
Publication of JPS5320866A publication Critical patent/JPS5320866A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To make easy the disposition mechanism of both objects each formed with patterns by increasing the spacing between both patterns which are superposedly disposed as well as to make possible the use of even said objects of poor flatness and yet obviate the degradation in relative position deviation observing accuracy.
COPYRIGHT: (C)1978,JPO&Japio
JP9489176A 1976-08-11 1976-08-11 Relative position deviation observing apparatus of patterns Pending JPS5320866A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9489176A JPS5320866A (en) 1976-08-11 1976-08-11 Relative position deviation observing apparatus of patterns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9489176A JPS5320866A (en) 1976-08-11 1976-08-11 Relative position deviation observing apparatus of patterns

Publications (1)

Publication Number Publication Date
JPS5320866A true JPS5320866A (en) 1978-02-25

Family

ID=14122653

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9489176A Pending JPS5320866A (en) 1976-08-11 1976-08-11 Relative position deviation observing apparatus of patterns

Country Status (1)

Country Link
JP (1) JPS5320866A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114423A (en) * 1978-02-27 1979-09-06 Nippon Steel Corp Production of ferritic stainless steel free of ridging
JPS5863559U (en) * 1981-10-24 1983-04-28 株式会社島津製作所 X-ray fluoroscope
JP2009288301A (en) * 2008-05-27 2009-12-10 V Technology Co Ltd Proximity exposure apparatus
JP2011003605A (en) * 2009-06-16 2011-01-06 Hitachi High-Technologies Corp Proximity aligner, alignment method for proximity aligner, and manufacturing method for display panel board

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54114423A (en) * 1978-02-27 1979-09-06 Nippon Steel Corp Production of ferritic stainless steel free of ridging
JPS5761096B2 (en) * 1978-02-27 1982-12-22 Nippon Steel Corp
JPS5863559U (en) * 1981-10-24 1983-04-28 株式会社島津製作所 X-ray fluoroscope
JPS6336266Y2 (en) * 1981-10-24 1988-09-27
JP2009288301A (en) * 2008-05-27 2009-12-10 V Technology Co Ltd Proximity exposure apparatus
JP2011003605A (en) * 2009-06-16 2011-01-06 Hitachi High-Technologies Corp Proximity aligner, alignment method for proximity aligner, and manufacturing method for display panel board

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