JPS522547A - Optical method to measure displacement of plane - Google Patents

Optical method to measure displacement of plane

Info

Publication number
JPS522547A
JPS522547A JP7805975A JP7805975A JPS522547A JP S522547 A JPS522547 A JP S522547A JP 7805975 A JP7805975 A JP 7805975A JP 7805975 A JP7805975 A JP 7805975A JP S522547 A JPS522547 A JP S522547A
Authority
JP
Japan
Prior art keywords
plane
optical method
measure displacement
displacement
measure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7805975A
Other languages
Japanese (ja)
Other versions
JPS5347181B2 (en
Inventor
Kosuke Nakajima
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP7805975A priority Critical patent/JPS5347181B2/ja
Publication of JPS522547A publication Critical patent/JPS522547A/en
Publication of JPS5347181B2 publication Critical patent/JPS5347181B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To measure with high precision the displacement of plane of the entire surface of the object to be measured having indentation or pattern on the surface.
COPYRIGHT: (C)1977,JPO&Japio
JP7805975A 1975-06-24 1975-06-24 Expired JPS5347181B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7805975A JPS5347181B2 (en) 1975-06-24 1975-06-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7805975A JPS5347181B2 (en) 1975-06-24 1975-06-24

Publications (2)

Publication Number Publication Date
JPS522547A true JPS522547A (en) 1977-01-10
JPS5347181B2 JPS5347181B2 (en) 1978-12-19

Family

ID=13651268

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7805975A Expired JPS5347181B2 (en) 1975-06-24 1975-06-24

Country Status (1)

Country Link
JP (1) JPS5347181B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5642205A (en) * 1979-09-17 1981-04-20 Nippon Kogaku Kk <Nikon> Focus detecting method
JPS611375U (en) * 1985-04-22 1986-01-07
JPS611378U (en) * 1985-04-22 1986-01-07
JPS6154472U (en) * 1984-06-06 1986-04-12
JPS62236678A (en) * 1986-04-04 1987-10-16 Hitachi Koki Kk Screw driver

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6135577Y2 (en) * 1980-03-02 1986-10-16

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5642205A (en) * 1979-09-17 1981-04-20 Nippon Kogaku Kk <Nikon> Focus detecting method
JPH0141962B2 (en) * 1979-09-17 1989-09-08 Nikon Kk
JPS6154472U (en) * 1984-06-06 1986-04-12
JPH0232389Y2 (en) * 1984-06-06 1990-09-03
JPS611375U (en) * 1985-04-22 1986-01-07
JPS611378U (en) * 1985-04-22 1986-01-07
JPS62236678A (en) * 1986-04-04 1987-10-16 Hitachi Koki Kk Screw driver

Also Published As

Publication number Publication date
JPS5347181B2 (en) 1978-12-19

Similar Documents

Publication Publication Date Title
JPS522547A (en) Optical method to measure displacement of plane
JPS51137443A (en) Method for measuring dimensions of three-dimensional structures
JPS51117080A (en) Magnetic field measuring method using hall element
JPS5252686A (en) Relative humidity meter
JPS53127266A (en) Forming method of marker
JPS522546A (en) Optical device to measure displacement of plane
JPS51111073A (en) Fine pattern forming
JPS5320866A (en) Relative position deviation observing apparatus of patterns
JPS5228872A (en) Method for measuring the size of thin plane
JPS51124454A (en) Surface coarseness measuring method and equipment
JPS5232186A (en) Spherical surface processing device
JPS5263379A (en) Measurement of space filter speeds using coherent light
JPS5224559A (en) Electromagnetic type mold level detector
JPS526193A (en) Hole-interior-wall-surface-grinding-work -dimension measuring device
JPS5347863A (en) Length measurement of summing operation type
JPS5248347A (en) Non-contact method of measuring clearance or level difference by the u se of wave interference phenomena
JPS525082A (en) Polishing method
JPS5223959A (en) Nicrometer in which a measuring range is made variable
JPS525580A (en) Reversibee stop-watch
JPS5252661A (en) Measurement of parallelism
JPS51126190A (en) Optical measurement, calculation circuit
JPS5430865A (en) Surface shape measuring method
JPS51134144A (en) Distance gauge
JPS5228377A (en) Temperature distribution measuring device
JPS522550A (en) Method to measure surface shape