JPS522550A - Method to measure surface shape - Google Patents

Method to measure surface shape

Info

Publication number
JPS522550A
JPS522550A JP7788475A JP7788475A JPS522550A JP S522550 A JPS522550 A JP S522550A JP 7788475 A JP7788475 A JP 7788475A JP 7788475 A JP7788475 A JP 7788475A JP S522550 A JPS522550 A JP S522550A
Authority
JP
Japan
Prior art keywords
surface shape
measure surface
measure
vibration
high precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7788475A
Other languages
Japanese (ja)
Inventor
Tadayuki Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Radio Co Ltd
Original Assignee
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Radio Co Ltd filed Critical Japan Radio Co Ltd
Priority to JP7788475A priority Critical patent/JPS522550A/en
Publication of JPS522550A publication Critical patent/JPS522550A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE: To measure surface shape of object with high precision by eliminating mechanical disturbance and vibration.
COPYRIGHT: (C)1977,JPO&Japio
JP7788475A 1975-06-24 1975-06-24 Method to measure surface shape Pending JPS522550A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7788475A JPS522550A (en) 1975-06-24 1975-06-24 Method to measure surface shape

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7788475A JPS522550A (en) 1975-06-24 1975-06-24 Method to measure surface shape

Publications (1)

Publication Number Publication Date
JPS522550A true JPS522550A (en) 1977-01-10

Family

ID=13646489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7788475A Pending JPS522550A (en) 1975-06-24 1975-06-24 Method to measure surface shape

Country Status (1)

Country Link
JP (1) JPS522550A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49118449A (en) * 1973-03-13 1974-11-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49118449A (en) * 1973-03-13 1974-11-12

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