JPS522550A - Method to measure surface shape - Google Patents
Method to measure surface shapeInfo
- Publication number
- JPS522550A JPS522550A JP7788475A JP7788475A JPS522550A JP S522550 A JPS522550 A JP S522550A JP 7788475 A JP7788475 A JP 7788475A JP 7788475 A JP7788475 A JP 7788475A JP S522550 A JPS522550 A JP S522550A
- Authority
- JP
- Japan
- Prior art keywords
- surface shape
- measure surface
- measure
- vibration
- high precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE: To measure surface shape of object with high precision by eliminating mechanical disturbance and vibration.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7788475A JPS522550A (en) | 1975-06-24 | 1975-06-24 | Method to measure surface shape |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7788475A JPS522550A (en) | 1975-06-24 | 1975-06-24 | Method to measure surface shape |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS522550A true JPS522550A (en) | 1977-01-10 |
Family
ID=13646489
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7788475A Pending JPS522550A (en) | 1975-06-24 | 1975-06-24 | Method to measure surface shape |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS522550A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49118449A (en) * | 1973-03-13 | 1974-11-12 |
-
1975
- 1975-06-24 JP JP7788475A patent/JPS522550A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49118449A (en) * | 1973-03-13 | 1974-11-12 |
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