JPS5430865A - Surface shape measuring method - Google Patents

Surface shape measuring method

Info

Publication number
JPS5430865A
JPS5430865A JP9606777A JP9606777A JPS5430865A JP S5430865 A JPS5430865 A JP S5430865A JP 9606777 A JP9606777 A JP 9606777A JP 9606777 A JP9606777 A JP 9606777A JP S5430865 A JPS5430865 A JP S5430865A
Authority
JP
Japan
Prior art keywords
measuring method
surface shape
shape measuring
measured
rotating plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9606777A
Other languages
Japanese (ja)
Other versions
JPS6132603B2 (en
Inventor
Toshio Akatsu
Akira Hirai
Toshimitsu Fujiyoshi
Hiroshi Nomura
Yoshiyuki Kaneko
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52096067A priority Critical patent/JPS6132603B2/ja
Publication of JPS5430865A publication Critical patent/JPS5430865A/en
Publication of JPS6132603B2 publication Critical patent/JPS6132603B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To reduce measurement time and enhance measurement accuracy by setting the rotating plane of laser light parallel to the line connecting both ends of the surface to be measured and measuring the distance between the rotating plane and the surface to be measured at each measurement point with photo detectors.
COPYRIGHT: (C)1979,JPO&Japio
JP52096067A 1977-08-12 1977-08-12 Expired JPS6132603B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52096067A JPS6132603B2 (en) 1977-08-12 1977-08-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52096067A JPS6132603B2 (en) 1977-08-12 1977-08-12

Publications (2)

Publication Number Publication Date
JPS5430865A true JPS5430865A (en) 1979-03-07
JPS6132603B2 JPS6132603B2 (en) 1986-07-28

Family

ID=14155071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52096067A Expired JPS6132603B2 (en) 1977-08-12 1977-08-12

Country Status (1)

Country Link
JP (1) JPS6132603B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646806U (en) * 1979-09-19 1981-04-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646806U (en) * 1979-09-19 1981-04-25

Also Published As

Publication number Publication date
JPS6132603B2 (en) 1986-07-28

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