JPS5257843A - Measuring device for thickness of film - Google Patents
Measuring device for thickness of filmInfo
- Publication number
- JPS5257843A JPS5257843A JP13307575A JP13307575A JPS5257843A JP S5257843 A JPS5257843 A JP S5257843A JP 13307575 A JP13307575 A JP 13307575A JP 13307575 A JP13307575 A JP 13307575A JP S5257843 A JPS5257843 A JP S5257843A
- Authority
- JP
- Japan
- Prior art keywords
- film
- thickness
- measuring device
- light
- render
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To render it possible to measure the thickness of a film in a non-contact and destructive manner while retaining a good signal-to-noise ratio by permitting polarized light to fall on the surface of a film on a substrate whose refractive indices are close to each other and detecting the intensity of the light interfered by the light reflected from a boundary surface where the refrative index undergoes a change.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13307575A JPS5257843A (en) | 1975-11-07 | 1975-11-07 | Measuring device for thickness of film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13307575A JPS5257843A (en) | 1975-11-07 | 1975-11-07 | Measuring device for thickness of film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5257843A true JPS5257843A (en) | 1977-05-12 |
Family
ID=15096248
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13307575A Pending JPS5257843A (en) | 1975-11-07 | 1975-11-07 | Measuring device for thickness of film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5257843A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008292296A (en) * | 2007-05-24 | 2008-12-04 | Toray Eng Co Ltd | Method for measuring film thickness of transparency film and its apparatus |
CN107504908A (en) * | 2017-08-17 | 2017-12-22 | 中国计量大学 | White light reflection dynamic measurement film thickness method based on wavelet modulus maxima |
WO2018216410A1 (en) * | 2017-05-26 | 2018-11-29 | コニカミノルタ株式会社 | Measurement device |
-
1975
- 1975-11-07 JP JP13307575A patent/JPS5257843A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008292296A (en) * | 2007-05-24 | 2008-12-04 | Toray Eng Co Ltd | Method for measuring film thickness of transparency film and its apparatus |
WO2018216410A1 (en) * | 2017-05-26 | 2018-11-29 | コニカミノルタ株式会社 | Measurement device |
JPWO2018216410A1 (en) * | 2017-05-26 | 2020-03-26 | コニカミノルタ株式会社 | measuring device |
CN107504908A (en) * | 2017-08-17 | 2017-12-22 | 中国计量大学 | White light reflection dynamic measurement film thickness method based on wavelet modulus maxima |
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