JPS5257843A - Measuring device for thickness of film - Google Patents

Measuring device for thickness of film

Info

Publication number
JPS5257843A
JPS5257843A JP13307575A JP13307575A JPS5257843A JP S5257843 A JPS5257843 A JP S5257843A JP 13307575 A JP13307575 A JP 13307575A JP 13307575 A JP13307575 A JP 13307575A JP S5257843 A JPS5257843 A JP S5257843A
Authority
JP
Japan
Prior art keywords
film
thickness
measuring device
light
render
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13307575A
Other languages
Japanese (ja)
Inventor
Yasuhiko Shindo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13307575A priority Critical patent/JPS5257843A/en
Publication of JPS5257843A publication Critical patent/JPS5257843A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To render it possible to measure the thickness of a film in a non-contact and destructive manner while retaining a good signal-to-noise ratio by permitting polarized light to fall on the surface of a film on a substrate whose refractive indices are close to each other and detecting the intensity of the light interfered by the light reflected from a boundary surface where the refrative index undergoes a change.
COPYRIGHT: (C)1977,JPO&Japio
JP13307575A 1975-11-07 1975-11-07 Measuring device for thickness of film Pending JPS5257843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13307575A JPS5257843A (en) 1975-11-07 1975-11-07 Measuring device for thickness of film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13307575A JPS5257843A (en) 1975-11-07 1975-11-07 Measuring device for thickness of film

Publications (1)

Publication Number Publication Date
JPS5257843A true JPS5257843A (en) 1977-05-12

Family

ID=15096248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13307575A Pending JPS5257843A (en) 1975-11-07 1975-11-07 Measuring device for thickness of film

Country Status (1)

Country Link
JP (1) JPS5257843A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008292296A (en) * 2007-05-24 2008-12-04 Toray Eng Co Ltd Method for measuring film thickness of transparency film and its apparatus
CN107504908A (en) * 2017-08-17 2017-12-22 中国计量大学 White light reflection dynamic measurement film thickness method based on wavelet modulus maxima
WO2018216410A1 (en) * 2017-05-26 2018-11-29 コニカミノルタ株式会社 Measurement device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008292296A (en) * 2007-05-24 2008-12-04 Toray Eng Co Ltd Method for measuring film thickness of transparency film and its apparatus
WO2018216410A1 (en) * 2017-05-26 2018-11-29 コニカミノルタ株式会社 Measurement device
JPWO2018216410A1 (en) * 2017-05-26 2020-03-26 コニカミノルタ株式会社 measuring device
CN107504908A (en) * 2017-08-17 2017-12-22 中国计量大学 White light reflection dynamic measurement film thickness method based on wavelet modulus maxima

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