JPS5365777A - Surface defect detector - Google Patents

Surface defect detector

Info

Publication number
JPS5365777A
JPS5365777A JP14100876A JP14100876A JPS5365777A JP S5365777 A JPS5365777 A JP S5365777A JP 14100876 A JP14100876 A JP 14100876A JP 14100876 A JP14100876 A JP 14100876A JP S5365777 A JPS5365777 A JP S5365777A
Authority
JP
Japan
Prior art keywords
surface defect
defect detector
angle
flaw
irradiating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14100876A
Other languages
Japanese (ja)
Other versions
JPS57461B2 (en
Inventor
Katsuyuki Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP14100876A priority Critical patent/JPS5365777A/en
Publication of JPS5365777A publication Critical patent/JPS5365777A/en
Publication of JPS57461B2 publication Critical patent/JPS57461B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Optical Record Carriers (AREA)

Abstract

PURPOSE:To enable to detect up to minute flaw with a high accuracy, by detecting scattering light on the surface of flaw to be detected by irradiating light from irradiator, from the angle different from irradiating angle and reflected angle.
JP14100876A 1976-11-24 1976-11-24 Surface defect detector Granted JPS5365777A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14100876A JPS5365777A (en) 1976-11-24 1976-11-24 Surface defect detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14100876A JPS5365777A (en) 1976-11-24 1976-11-24 Surface defect detector

Publications (2)

Publication Number Publication Date
JPS5365777A true JPS5365777A (en) 1978-06-12
JPS57461B2 JPS57461B2 (en) 1982-01-06

Family

ID=15282031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14100876A Granted JPS5365777A (en) 1976-11-24 1976-11-24 Surface defect detector

Country Status (1)

Country Link
JP (1) JPS5365777A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619442A (en) * 1979-07-26 1981-02-24 Hitachi Electronics Eng Co Ltd Optical surface defect detector
JPS578435A (en) * 1980-05-16 1982-01-16 Gca Corp Automatic detector for fine particle on wide ranging surface left optically unground
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS57161641A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS60147945A (en) * 1984-01-10 1985-08-05 Victor Co Of Japan Ltd Optical disc check device
JPS61105447A (en) * 1985-10-23 1986-05-23 Hitachi Ltd Light collector for inspecting surface plate defect
JPS63241343A (en) * 1988-02-24 1988-10-06 Nikon Corp Defect inspector
JPH0492239A (en) * 1990-08-06 1992-03-25 Excel:Kk Flaw detecting method for tape of video tape or the like and device used in the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010188A (en) * 1973-05-25 1975-02-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010188A (en) * 1973-05-25 1975-02-01

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619442A (en) * 1979-07-26 1981-02-24 Hitachi Electronics Eng Co Ltd Optical surface defect detector
JPS631532B2 (en) * 1979-07-26 1988-01-13 Hitachi Electr Eng
JPS578435A (en) * 1980-05-16 1982-01-16 Gca Corp Automatic detector for fine particle on wide ranging surface left optically unground
JPH0143901B2 (en) * 1980-05-16 1989-09-25 Kyuu Shii Oputeikusu Inc
JPS57161642A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPS57161641A (en) * 1981-03-31 1982-10-05 Olympus Optical Co Ltd Inspecting device for defect of surface
JPH0368337B2 (en) * 1981-03-31 1991-10-28 Olympus Optical Co
JPS60147945A (en) * 1984-01-10 1985-08-05 Victor Co Of Japan Ltd Optical disc check device
JPS61105447A (en) * 1985-10-23 1986-05-23 Hitachi Ltd Light collector for inspecting surface plate defect
JPS63241343A (en) * 1988-02-24 1988-10-06 Nikon Corp Defect inspector
JPH0492239A (en) * 1990-08-06 1992-03-25 Excel:Kk Flaw detecting method for tape of video tape or the like and device used in the same

Also Published As

Publication number Publication date
JPS57461B2 (en) 1982-01-06

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