JPS5372679A - Surface defect detection of test piece - Google Patents

Surface defect detection of test piece

Info

Publication number
JPS5372679A
JPS5372679A JP14776476A JP14776476A JPS5372679A JP S5372679 A JPS5372679 A JP S5372679A JP 14776476 A JP14776476 A JP 14776476A JP 14776476 A JP14776476 A JP 14776476A JP S5372679 A JPS5372679 A JP S5372679A
Authority
JP
Japan
Prior art keywords
test piece
defect detection
surface defect
lights
scattered lights
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14776476A
Other languages
Japanese (ja)
Inventor
Yasuo Nakagawa
Toshimitsu Hamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to IS2359A priority Critical patent/IS1093B6/en
Priority to IS2359D priority patent/IS1094B6/en
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14776476A priority patent/JPS5372679A/en
Priority to US05/859,206 priority patent/US4162126A/en
Publication of JPS5372679A publication Critical patent/JPS5372679A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To accomplish at a high speed the classification and appreciation of the kinds of defects on the surface of a test piece with the use of a simple construction by detecting the scattered lights from the test piece with the irradiation lights in two directions and by converting the scattered lights into binary signals.
JP14776476A 1976-12-10 1976-12-10 Surface defect detection of test piece Pending JPS5372679A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
IS2359A IS1093B6 (en) 1976-12-10 1976-12-06 A new type of cork line and a method for creating it
IS2359D IS1094B6 (en) 1976-12-10 1976-12-06 Devices for creating a new type of cork line
JP14776476A JPS5372679A (en) 1976-12-10 1976-12-10 Surface defect detection of test piece
US05/859,206 US4162126A (en) 1976-12-10 1977-12-09 Surface detect test apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14776476A JPS5372679A (en) 1976-12-10 1976-12-10 Surface defect detection of test piece

Publications (1)

Publication Number Publication Date
JPS5372679A true JPS5372679A (en) 1978-06-28

Family

ID=15437633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14776476A Pending JPS5372679A (en) 1976-12-10 1976-12-10 Surface defect detection of test piece

Country Status (2)

Country Link
JP (1) JPS5372679A (en)
IS (2) IS1094B6 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868630A (en) * 1981-10-20 1983-04-23 Toppan Printing Co Ltd Method for checking defect in multicolor pattern
JPS58211636A (en) * 1982-06-03 1983-12-09 Eisai Co Ltd Decision method and apparatus for inspection
JPH02100393A (en) * 1988-10-07 1990-04-12 Hitachi Ltd Method and device for inspecting state filling of through-hole
JPH05232044A (en) * 1991-11-22 1993-09-07 Elkem Technol As Method for detecting pinhole of continuously cast metal billet
US5283642A (en) * 1992-03-16 1994-02-01 The Boeing Company Scratch measurement apparatus and method
US5493123A (en) * 1994-04-28 1996-02-20 Particle Measuring Systems, Inc. Surface defect inspection system and method

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868630A (en) * 1981-10-20 1983-04-23 Toppan Printing Co Ltd Method for checking defect in multicolor pattern
JPS58211636A (en) * 1982-06-03 1983-12-09 Eisai Co Ltd Decision method and apparatus for inspection
JPH02100393A (en) * 1988-10-07 1990-04-12 Hitachi Ltd Method and device for inspecting state filling of through-hole
JPH05232044A (en) * 1991-11-22 1993-09-07 Elkem Technol As Method for detecting pinhole of continuously cast metal billet
US5283642A (en) * 1992-03-16 1994-02-01 The Boeing Company Scratch measurement apparatus and method
US5493123A (en) * 1994-04-28 1996-02-20 Particle Measuring Systems, Inc. Surface defect inspection system and method

Also Published As

Publication number Publication date
IS2359A7 (en) 1977-10-28
IS1093B6 (en) 1982-09-24
IS1094B6 (en) 1982-09-24

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