JPS5224553A - Surface inspection device - Google Patents

Surface inspection device

Info

Publication number
JPS5224553A
JPS5224553A JP50100197A JP10019775A JPS5224553A JP S5224553 A JPS5224553 A JP S5224553A JP 50100197 A JP50100197 A JP 50100197A JP 10019775 A JP10019775 A JP 10019775A JP S5224553 A JPS5224553 A JP S5224553A
Authority
JP
Japan
Prior art keywords
inspection device
surface inspection
pattern
whichis
stains
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50100197A
Other languages
Japanese (ja)
Inventor
Yoshio Matsumoto
Tomohiro Kuni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50100197A priority Critical patent/JPS5224553A/en
Publication of JPS5224553A publication Critical patent/JPS5224553A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To reliably detect flaws, foreign matters or stains on the pattern of an object to be inspected, whichis detected by photoelectric element, corresponding to the width zone of a pattern formed on the object.
JP50100197A 1975-08-20 1975-08-20 Surface inspection device Pending JPS5224553A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50100197A JPS5224553A (en) 1975-08-20 1975-08-20 Surface inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50100197A JPS5224553A (en) 1975-08-20 1975-08-20 Surface inspection device

Publications (1)

Publication Number Publication Date
JPS5224553A true JPS5224553A (en) 1977-02-24

Family

ID=14267566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50100197A Pending JPS5224553A (en) 1975-08-20 1975-08-20 Surface inspection device

Country Status (1)

Country Link
JP (1) JPS5224553A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53107865A (en) * 1977-03-02 1978-09-20 Hitachi Ltd Detector of minute undulations
JPS5949921A (en) * 1982-09-17 1984-03-22 Toa Nenryo Kogyo Kk Extrusion coating method of polypropylene
JPS5950307A (en) * 1982-09-14 1984-03-23 Mitsubishi Electric Corp Laser type surface inspecting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53107865A (en) * 1977-03-02 1978-09-20 Hitachi Ltd Detector of minute undulations
JPS5950307A (en) * 1982-09-14 1984-03-23 Mitsubishi Electric Corp Laser type surface inspecting device
JPS5949921A (en) * 1982-09-17 1984-03-22 Toa Nenryo Kogyo Kk Extrusion coating method of polypropylene
JPH0317662B2 (en) * 1982-09-17 1991-03-08 Tonen Kk

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