JPS53107865A - Detector of minute undulations - Google Patents

Detector of minute undulations

Info

Publication number
JPS53107865A
JPS53107865A JP2155577A JP2155577A JPS53107865A JP S53107865 A JPS53107865 A JP S53107865A JP 2155577 A JP2155577 A JP 2155577A JP 2155577 A JP2155577 A JP 2155577A JP S53107865 A JPS53107865 A JP S53107865A
Authority
JP
Japan
Prior art keywords
detector
minute undulations
branching
light
brighted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2155577A
Other languages
Japanese (ja)
Inventor
Nobuyuki Akiyama
Mitsuyoshi Koizumi
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2155577A priority Critical patent/JPS53107865A/en
Publication of JPS53107865A publication Critical patent/JPS53107865A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE: To make possible accurate detection even in the case of large specimens by providing a parabolic reflector so as to enclose the optical path of light radiating to the specimen, branching the reflected light thereof to the right and left by means of a branching mirror and have the brighted light received in photo detectors.
COPYRIGHT: (C)1978,JPO&Japio
JP2155577A 1977-03-02 1977-03-02 Detector of minute undulations Pending JPS53107865A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2155577A JPS53107865A (en) 1977-03-02 1977-03-02 Detector of minute undulations

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2155577A JPS53107865A (en) 1977-03-02 1977-03-02 Detector of minute undulations

Publications (1)

Publication Number Publication Date
JPS53107865A true JPS53107865A (en) 1978-09-20

Family

ID=12058243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2155577A Pending JPS53107865A (en) 1977-03-02 1977-03-02 Detector of minute undulations

Country Status (1)

Country Link
JP (1) JPS53107865A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549240U (en) * 1978-09-29 1980-03-31
JPS5688139U (en) * 1979-12-10 1981-07-14
JPS62121340A (en) * 1985-11-19 1987-06-02 カ−ル・ツアイス−スチフツング Method and device for displaying target body to be observed in dark field by scanning type optical microscope
JP2017096912A (en) * 2016-06-09 2017-06-01 列真株式会社 Flaw detecting device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224553A (en) * 1975-08-20 1977-02-24 Hitachi Ltd Surface inspection device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224553A (en) * 1975-08-20 1977-02-24 Hitachi Ltd Surface inspection device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5549240U (en) * 1978-09-29 1980-03-31
JPS625646Y2 (en) * 1978-09-29 1987-02-09
JPS5688139U (en) * 1979-12-10 1981-07-14
JPS62121340A (en) * 1985-11-19 1987-06-02 カ−ル・ツアイス−スチフツング Method and device for displaying target body to be observed in dark field by scanning type optical microscope
JP2017096912A (en) * 2016-06-09 2017-06-01 列真株式会社 Flaw detecting device

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