JPS53107865A - Detector of minute undulations - Google Patents
Detector of minute undulationsInfo
- Publication number
- JPS53107865A JPS53107865A JP2155577A JP2155577A JPS53107865A JP S53107865 A JPS53107865 A JP S53107865A JP 2155577 A JP2155577 A JP 2155577A JP 2155577 A JP2155577 A JP 2155577A JP S53107865 A JPS53107865 A JP S53107865A
- Authority
- JP
- Japan
- Prior art keywords
- detector
- minute undulations
- branching
- light
- brighted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE: To make possible accurate detection even in the case of large specimens by providing a parabolic reflector so as to enclose the optical path of light radiating to the specimen, branching the reflected light thereof to the right and left by means of a branching mirror and have the brighted light received in photo detectors.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2155577A JPS53107865A (en) | 1977-03-02 | 1977-03-02 | Detector of minute undulations |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2155577A JPS53107865A (en) | 1977-03-02 | 1977-03-02 | Detector of minute undulations |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53107865A true JPS53107865A (en) | 1978-09-20 |
Family
ID=12058243
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2155577A Pending JPS53107865A (en) | 1977-03-02 | 1977-03-02 | Detector of minute undulations |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53107865A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5549240U (en) * | 1978-09-29 | 1980-03-31 | ||
JPS5688139U (en) * | 1979-12-10 | 1981-07-14 | ||
JPS62121340A (en) * | 1985-11-19 | 1987-06-02 | カ−ル・ツアイス−スチフツング | Method and device for displaying target body to be observed in dark field by scanning type optical microscope |
JP2017096912A (en) * | 2016-06-09 | 2017-06-01 | 列真株式会社 | Flaw detecting device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5224553A (en) * | 1975-08-20 | 1977-02-24 | Hitachi Ltd | Surface inspection device |
-
1977
- 1977-03-02 JP JP2155577A patent/JPS53107865A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5224553A (en) * | 1975-08-20 | 1977-02-24 | Hitachi Ltd | Surface inspection device |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5549240U (en) * | 1978-09-29 | 1980-03-31 | ||
JPS625646Y2 (en) * | 1978-09-29 | 1987-02-09 | ||
JPS5688139U (en) * | 1979-12-10 | 1981-07-14 | ||
JPS62121340A (en) * | 1985-11-19 | 1987-06-02 | カ−ル・ツアイス−スチフツング | Method and device for displaying target body to be observed in dark field by scanning type optical microscope |
JP2017096912A (en) * | 2016-06-09 | 2017-06-01 | 列真株式会社 | Flaw detecting device |
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