JPS5619442A - Optical surface defect detector - Google Patents

Optical surface defect detector

Info

Publication number
JPS5619442A
JPS5619442A JP9429979A JP9429979A JPS5619442A JP S5619442 A JPS5619442 A JP S5619442A JP 9429979 A JP9429979 A JP 9429979A JP 9429979 A JP9429979 A JP 9429979A JP S5619442 A JPS5619442 A JP S5619442A
Authority
JP
Japan
Prior art keywords
optical fibers
plane plate
surface defect
arrayed
zigzag
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9429979A
Other languages
Japanese (ja)
Other versions
JPS631532B2 (en
Inventor
Motoo Hourai
Susumu Tanaka
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP9429979A priority Critical patent/JPS5619442A/en
Publication of JPS5619442A publication Critical patent/JPS5619442A/en
Publication of JPS631532B2 publication Critical patent/JPS631532B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To improve detection performance by preventing disturbance due to stray light while lessening a sensitivity deviation, by arranging optical fibers having photoelectric converting elements connected to other-side terminals, slantingly over both ends of a scanning line of a beam spot. CONSTITUTION:Optical fibers 8 penetrate through-holes 9 provided to holder 11 and end face 8' are fixed by setsecrew 14 by adjusting being sufficiently close to the scanning line of a beam spot on plane plate 3. Further right and left optical fibers 8 are arrayed in zigzag. A laser beam is projected upon plane plate 3 as shown by arrow A in the figure and its reflected light is supplied to photoelectric converting elements as the other side terminals of optical fibers 8 to regard scattering reflection of more than fixed intensity as a surface defect. Optical fibers 8 are arrayed in zigzag to reduce a sensitivity deviation and end faces 8' are set close to plane plate 3 to photodetect little stray light, so that the detection performance can be improved.
JP9429979A 1979-07-26 1979-07-26 Optical surface defect detector Granted JPS5619442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9429979A JPS5619442A (en) 1979-07-26 1979-07-26 Optical surface defect detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9429979A JPS5619442A (en) 1979-07-26 1979-07-26 Optical surface defect detector

Publications (2)

Publication Number Publication Date
JPS5619442A true JPS5619442A (en) 1981-02-24
JPS631532B2 JPS631532B2 (en) 1988-01-13

Family

ID=14106382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9429979A Granted JPS5619442A (en) 1979-07-26 1979-07-26 Optical surface defect detector

Country Status (1)

Country Link
JP (1) JPS5619442A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084290A (en) * 1973-11-26 1975-07-08
JPS5365777A (en) * 1976-11-24 1978-06-12 Nippon Telegr & Teleph Corp <Ntt> Surface defect detector

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5084290A (en) * 1973-11-26 1975-07-08
JPS5365777A (en) * 1976-11-24 1978-06-12 Nippon Telegr & Teleph Corp <Ntt> Surface defect detector

Also Published As

Publication number Publication date
JPS631532B2 (en) 1988-01-13

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