JPS5712351A - Detector for surface fault - Google Patents

Detector for surface fault

Info

Publication number
JPS5712351A
JPS5712351A JP8681780A JP8681780A JPS5712351A JP S5712351 A JPS5712351 A JP S5712351A JP 8681780 A JP8681780 A JP 8681780A JP 8681780 A JP8681780 A JP 8681780A JP S5712351 A JPS5712351 A JP S5712351A
Authority
JP
Japan
Prior art keywords
sample
detector
transmitted
light
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8681780A
Other languages
Japanese (ja)
Inventor
Tomohiro Kuji
Nobuyuki Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP8681780A priority Critical patent/JPS5712351A/en
Publication of JPS5712351A publication Critical patent/JPS5712351A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To detect the fine uneveness, etc., of the surface of a transparent platelike sample with high reliability by projecting spot-shaped laser light on the surface of the sample and by detecting its transmitted light. CONSTITUTION:Laser light striking the surface of a sample 7 as a spot 6 through a condenser lens 5 is transmitted through the sample as a light beam 11, which is made incident to a detector 12 to detect its intensity. If the surface of the sample 7 is uneven, light 13 transmitted is diffused to strike the detector 14, which detects its intensity.
JP8681780A 1980-06-26 1980-06-26 Detector for surface fault Pending JPS5712351A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8681780A JPS5712351A (en) 1980-06-26 1980-06-26 Detector for surface fault

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8681780A JPS5712351A (en) 1980-06-26 1980-06-26 Detector for surface fault

Publications (1)

Publication Number Publication Date
JPS5712351A true JPS5712351A (en) 1982-01-22

Family

ID=13897351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8681780A Pending JPS5712351A (en) 1980-06-26 1980-06-26 Detector for surface fault

Country Status (1)

Country Link
JP (1) JPS5712351A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63107079A (en) * 1986-10-23 1988-05-12 Mitsubishi Electric Corp Laser equipment
JPH05215690A (en) * 1992-02-03 1993-08-24 Hitachi Electron Eng Co Ltd Inspecting apparatus for foreign matter
JPH0621875B2 (en) * 1986-05-05 1994-03-23 ヒユーズ・エアクラフト・カンパニー Self-contained surface contamination sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5570732A (en) * 1978-11-22 1980-05-28 Hitachi Ltd Inspection unit by laser light for fine deficiency on surface

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5570732A (en) * 1978-11-22 1980-05-28 Hitachi Ltd Inspection unit by laser light for fine deficiency on surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0621875B2 (en) * 1986-05-05 1994-03-23 ヒユーズ・エアクラフト・カンパニー Self-contained surface contamination sensor
JPS63107079A (en) * 1986-10-23 1988-05-12 Mitsubishi Electric Corp Laser equipment
JPH05215690A (en) * 1992-02-03 1993-08-24 Hitachi Electron Eng Co Ltd Inspecting apparatus for foreign matter

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