JPS5737253A - Defect detection device for transparent body - Google Patents
Defect detection device for transparent bodyInfo
- Publication number
- JPS5737253A JPS5737253A JP11296280A JP11296280A JPS5737253A JP S5737253 A JPS5737253 A JP S5737253A JP 11296280 A JP11296280 A JP 11296280A JP 11296280 A JP11296280 A JP 11296280A JP S5737253 A JPS5737253 A JP S5737253A
- Authority
- JP
- Japan
- Prior art keywords
- detection
- slit
- lights
- light
- panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To increase sensitivity of detection by projecting lights from different directions using plural number of lights sources to the position of an object to be inspected to check defects and detect the scattered light through a slit shutting out direct light. CONSTITUTION:Lights coming from two light sources 2, 2', being arranged on both sides of a dark-colored plate 7, are projected to the detection range of a TV-panel 1. The scattered light is received by a detector 4 through a slit 5 of a slit type shielding plate 3. If necessary, the detection part is illuminated by light sources 10, 10'. The TV-panel 1 is moved in the direction of the arrow, and continuous detection is performed. This method increases detection sensitivity of the equipment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11296280A JPS5737253A (en) | 1980-08-19 | 1980-08-19 | Defect detection device for transparent body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11296280A JPS5737253A (en) | 1980-08-19 | 1980-08-19 | Defect detection device for transparent body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5737253A true JPS5737253A (en) | 1982-03-01 |
Family
ID=14599889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11296280A Pending JPS5737253A (en) | 1980-08-19 | 1980-08-19 | Defect detection device for transparent body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5737253A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59189722A (en) * | 1983-04-13 | 1984-10-27 | Hitachi Ltd | Timing signal generating circuit |
JPS61186806A (en) * | 1985-02-14 | 1986-08-20 | Nec Corp | Fault detecting device for transparent body |
JPH02102439A (en) * | 1988-10-12 | 1990-04-16 | Nissan Motor Co Ltd | Evaluating device for sticking body or the like on plate surface |
JPH04344447A (en) * | 1991-05-22 | 1992-12-01 | Shin Etsu Chem Co Ltd | Detecting device for defect in transparent glass substrate |
-
1980
- 1980-08-19 JP JP11296280A patent/JPS5737253A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59189722A (en) * | 1983-04-13 | 1984-10-27 | Hitachi Ltd | Timing signal generating circuit |
JPS61186806A (en) * | 1985-02-14 | 1986-08-20 | Nec Corp | Fault detecting device for transparent body |
JPH02102439A (en) * | 1988-10-12 | 1990-04-16 | Nissan Motor Co Ltd | Evaluating device for sticking body or the like on plate surface |
JPH04344447A (en) * | 1991-05-22 | 1992-12-01 | Shin Etsu Chem Co Ltd | Detecting device for defect in transparent glass substrate |
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