JPS52140384A - Flaw detector - Google Patents
Flaw detectorInfo
- Publication number
- JPS52140384A JPS52140384A JP5652076A JP5652076A JPS52140384A JP S52140384 A JPS52140384 A JP S52140384A JP 5652076 A JP5652076 A JP 5652076A JP 5652076 A JP5652076 A JP 5652076A JP S52140384 A JPS52140384 A JP S52140384A
- Authority
- JP
- Japan
- Prior art keywords
- flaw detector
- flaw
- diffraction
- scattering
- reflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Abstract
PURPOSE:To automatically detect the flaw in the face of glass plate, by receiving and indicating the secondary light caused by disturbance resulted from reflection, diffraction, scattering, absorption, etc., when the ray goes through the defective place.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5652076A JPS6026174B2 (en) | 1976-05-19 | 1976-05-19 | Defect detection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5652076A JPS6026174B2 (en) | 1976-05-19 | 1976-05-19 | Defect detection device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52140384A true JPS52140384A (en) | 1977-11-22 |
JPS6026174B2 JPS6026174B2 (en) | 1985-06-22 |
Family
ID=13029382
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5652076A Expired JPS6026174B2 (en) | 1976-05-19 | 1976-05-19 | Defect detection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6026174B2 (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55104743A (en) * | 1979-02-06 | 1980-08-11 | Fujitsu Ltd | Method for inspecting substrate |
JPS56117153A (en) * | 1980-02-21 | 1981-09-14 | Telmec Co Ltd | Detecting apparatus for dust of negative plate of photograph |
JPS57127791A (en) * | 1980-12-17 | 1982-08-09 | Studiengesellschaft Kohle Mbh | Method of apparatus for transferring optimum heat |
JPS57131039A (en) * | 1981-02-07 | 1982-08-13 | Olympus Optical Co Ltd | Defect detector |
JPS585636A (en) * | 1981-06-30 | 1983-01-13 | Fujitsu Ltd | Inspecting method for object to be inspected |
JPS61117433A (en) * | 1984-11-14 | 1986-06-04 | Hitachi Ltd | Method and device for detecting foreign matter |
JPS6367549A (en) * | 1986-09-10 | 1988-03-26 | Pioneer Electronic Corp | Defect inspecting and film thickness measuring instrument for resist original disk |
US5331396A (en) * | 1991-10-08 | 1994-07-19 | Matsushita Electric Industrial Co., Ltd. | Foreign matter detection device |
-
1976
- 1976-05-19 JP JP5652076A patent/JPS6026174B2/en not_active Expired
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55104743A (en) * | 1979-02-06 | 1980-08-11 | Fujitsu Ltd | Method for inspecting substrate |
JPS56117153A (en) * | 1980-02-21 | 1981-09-14 | Telmec Co Ltd | Detecting apparatus for dust of negative plate of photograph |
JPH033179B2 (en) * | 1980-02-21 | 1991-01-17 | Tokyo Electron Ltd | |
JPS57127791A (en) * | 1980-12-17 | 1982-08-09 | Studiengesellschaft Kohle Mbh | Method of apparatus for transferring optimum heat |
JPS57131039A (en) * | 1981-02-07 | 1982-08-13 | Olympus Optical Co Ltd | Defect detector |
JPH036460B2 (en) * | 1981-02-07 | 1991-01-30 | Olympus Optical Co | |
JPS585636A (en) * | 1981-06-30 | 1983-01-13 | Fujitsu Ltd | Inspecting method for object to be inspected |
JPS61117433A (en) * | 1984-11-14 | 1986-06-04 | Hitachi Ltd | Method and device for detecting foreign matter |
JPS6367549A (en) * | 1986-09-10 | 1988-03-26 | Pioneer Electronic Corp | Defect inspecting and film thickness measuring instrument for resist original disk |
JPH0575262B2 (en) * | 1986-09-10 | 1993-10-20 | Pioneer Electronic Corp | |
US5331396A (en) * | 1991-10-08 | 1994-07-19 | Matsushita Electric Industrial Co., Ltd. | Foreign matter detection device |
Also Published As
Publication number | Publication date |
---|---|
JPS6026174B2 (en) | 1985-06-22 |
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