JPS57111401A - External form inspector - Google Patents

External form inspector

Info

Publication number
JPS57111401A
JPS57111401A JP18527680A JP18527680A JPS57111401A JP S57111401 A JPS57111401 A JP S57111401A JP 18527680 A JP18527680 A JP 18527680A JP 18527680 A JP18527680 A JP 18527680A JP S57111401 A JPS57111401 A JP S57111401A
Authority
JP
Japan
Prior art keywords
groove part
inspected
defect
scattered
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18527680A
Other languages
Japanese (ja)
Inventor
Hidekazu Sekizawa
Akito Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP18527680A priority Critical patent/JPS57111401A/en
Publication of JPS57111401A publication Critical patent/JPS57111401A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Sealing Battery Cases Or Jackets (AREA)

Abstract

PURPOSE:To detect the defect of an object to be inspected which has a circular edge form, by irradiating the light beam to the object to be inspected and detecting the scattered beams of the light beam which are radiated in the directions excepting the forward reflecting direction. CONSTITUTION:An object 2 to be inspected which has a circular edge form is turned by a rotary driving device 1 toward an arrow mark and in a certain speed. A laser beam 6 given from a light source 5 is irradiated via a collimator lens 7 to the circular groove part of the object 2 on a rotary table 3. For instance, the beam 6 is irradiated with an angle 45 deg. on the tangent line at the groove part. Thus the beam 6 has a forward reflection as long as the groove part has no defect. If the groove part has some defect, the beam 6 is scattered at the defective area. These scattered beams are formed into an image at a pinhole 9 via a lens 8. The scattered beams are converted into the electric signals in accordance with the light volume through a photoelectric transducer 10 to be displayed at a display 14.
JP18527680A 1980-12-29 1980-12-29 External form inspector Pending JPS57111401A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18527680A JPS57111401A (en) 1980-12-29 1980-12-29 External form inspector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18527680A JPS57111401A (en) 1980-12-29 1980-12-29 External form inspector

Publications (1)

Publication Number Publication Date
JPS57111401A true JPS57111401A (en) 1982-07-10

Family

ID=16167989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18527680A Pending JPS57111401A (en) 1980-12-29 1980-12-29 External form inspector

Country Status (1)

Country Link
JP (1) JPS57111401A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5267381A (en) * 1991-02-19 1993-12-07 Westinghouse Electric Corp. Automatic tube processing system
JP2007265863A (en) * 2006-03-29 2007-10-11 Nec Lamilion Energy Ltd Manufacturing method of film sheathed battery
KR101204485B1 (en) 2005-12-21 2012-11-27 시게이트 테크놀로지 엘엘씨 Shaft cone metrology system and method
CN103645118A (en) * 2013-12-30 2014-03-19 中核建中核燃料元件有限公司 Cylindrical pellet density measurement device and measurement method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5267381A (en) * 1991-02-19 1993-12-07 Westinghouse Electric Corp. Automatic tube processing system
KR101204485B1 (en) 2005-12-21 2012-11-27 시게이트 테크놀로지 엘엘씨 Shaft cone metrology system and method
JP2007265863A (en) * 2006-03-29 2007-10-11 Nec Lamilion Energy Ltd Manufacturing method of film sheathed battery
CN103645118A (en) * 2013-12-30 2014-03-19 中核建中核燃料元件有限公司 Cylindrical pellet density measurement device and measurement method thereof
CN103645118B (en) * 2013-12-30 2015-09-02 中核建中核燃料元件有限公司 A kind of cylindrical pellet density measuring equipment and measuring method thereof

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