JPS53136881A - Defect examination apparatus - Google Patents

Defect examination apparatus

Info

Publication number
JPS53136881A
JPS53136881A JP5074677A JP5074677A JPS53136881A JP S53136881 A JPS53136881 A JP S53136881A JP 5074677 A JP5074677 A JP 5074677A JP 5074677 A JP5074677 A JP 5074677A JP S53136881 A JPS53136881 A JP S53136881A
Authority
JP
Japan
Prior art keywords
examination apparatus
defect examination
diffracted light
defect
preventing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5074677A
Other languages
Japanese (ja)
Other versions
JPS6049858B2 (en
Inventor
Tadashi Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52050746A priority Critical patent/JPS6049858B2/en
Publication of JPS53136881A publication Critical patent/JPS53136881A/en
Publication of JPS6049858B2 publication Critical patent/JPS6049858B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To automatically monitor defects at high S/N by providing a photo electric transducer in a position deviated from radiation light axis and preventing the effect of zero order diffracted light in an apparatus of utilizing laser diffracted light.
JP52050746A 1977-05-04 1977-05-04 Defect inspection equipment Expired JPS6049858B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52050746A JPS6049858B2 (en) 1977-05-04 1977-05-04 Defect inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52050746A JPS6049858B2 (en) 1977-05-04 1977-05-04 Defect inspection equipment

Publications (2)

Publication Number Publication Date
JPS53136881A true JPS53136881A (en) 1978-11-29
JPS6049858B2 JPS6049858B2 (en) 1985-11-05

Family

ID=12867394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52050746A Expired JPS6049858B2 (en) 1977-05-04 1977-05-04 Defect inspection equipment

Country Status (1)

Country Link
JP (1) JPS6049858B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788305A (en) * 1980-10-24 1982-06-02 Hamamatsu Systems Inc Detection of particle on material
EP0249799A2 (en) * 1986-06-14 1987-12-23 Battelle-Institut e.V. Apparatus for inspecting components of transparent material as to surface defects and inclusions

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5016593A (en) * 1973-06-11 1975-02-21
JPS517985A (en) * 1974-05-10 1976-01-22 Tokyo Shibaura Electric Co KETSUKANKENSHUTSUSOCHI

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5016593A (en) * 1973-06-11 1975-02-21
JPS517985A (en) * 1974-05-10 1976-01-22 Tokyo Shibaura Electric Co KETSUKANKENSHUTSUSOCHI

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788305A (en) * 1980-10-24 1982-06-02 Hamamatsu Systems Inc Detection of particle on material
EP0249799A2 (en) * 1986-06-14 1987-12-23 Battelle-Institut e.V. Apparatus for inspecting components of transparent material as to surface defects and inclusions

Also Published As

Publication number Publication date
JPS6049858B2 (en) 1985-11-05

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