JPS5289371A - Trouble detecting apparatus - Google Patents

Trouble detecting apparatus

Info

Publication number
JPS5289371A
JPS5289371A JP494176A JP494176A JPS5289371A JP S5289371 A JPS5289371 A JP S5289371A JP 494176 A JP494176 A JP 494176A JP 494176 A JP494176 A JP 494176A JP S5289371 A JPS5289371 A JP S5289371A
Authority
JP
Japan
Prior art keywords
detecting apparatus
trouble detecting
detecting
trouble
frunhofer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP494176A
Other languages
Japanese (ja)
Other versions
JPS6024424B2 (en
Inventor
Yasuhiko Shindou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP494176A priority Critical patent/JPS6024424B2/en
Publication of JPS5289371A publication Critical patent/JPS5289371A/en
Publication of JPS6024424B2 publication Critical patent/JPS6024424B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details

Abstract

PURPOSE:To provide a trouble detecting apparatus, in which Frunhofer diffraction and special light scanning method are employed so that detecting position may not be displaced through scanning of laser beam, whereby detecting section can be fixed in place and at the same time it is enabled to use extremely small detector.
JP494176A 1976-01-21 1976-01-21 Abnormality detection device Expired JPS6024424B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP494176A JPS6024424B2 (en) 1976-01-21 1976-01-21 Abnormality detection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP494176A JPS6024424B2 (en) 1976-01-21 1976-01-21 Abnormality detection device

Publications (2)

Publication Number Publication Date
JPS5289371A true JPS5289371A (en) 1977-07-26
JPS6024424B2 JPS6024424B2 (en) 1985-06-12

Family

ID=11597589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP494176A Expired JPS6024424B2 (en) 1976-01-21 1976-01-21 Abnormality detection device

Country Status (1)

Country Link
JP (1) JPS6024424B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635048U (en) * 1979-08-27 1981-04-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635048U (en) * 1979-08-27 1981-04-06

Also Published As

Publication number Publication date
JPS6024424B2 (en) 1985-06-12

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