JPS5798846A - X-ray diffractometer - Google Patents
X-ray diffractometerInfo
- Publication number
- JPS5798846A JPS5798846A JP55175164A JP17516480A JPS5798846A JP S5798846 A JPS5798846 A JP S5798846A JP 55175164 A JP55175164 A JP 55175164A JP 17516480 A JP17516480 A JP 17516480A JP S5798846 A JPS5798846 A JP S5798846A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- crystal
- light
- irradiation position
- monochrometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
Abstract
PURPOSE:To determine an irradiation position of X-ray and to perform a two- dimentional evaluation of a large-diametered crystal, by providing an X-ray irradiation position detecting mechanism which leads a light, asymmetrically reflected by a monochrometer crystal surface, onto an X-ray optical axis and irradiates the surface of a sample crystal with said light. CONSTITUTION:After an X-ray, produced from an X-ray focus 1, passes through a slit 2 and is formed into a monochrome by a monochrometer crystal 4, it passes through a slit 9 to enter a sample crystal 10. An X-ray 13 is asymmetrically reflected by the monochrometer crystal 4, and an X-ray, entering the sample crystal 10, is formed into an incident X-ray 14. Meanwhile, a visual light 15, emitted from a light source 6, is led to a light axis of an X-ray which is emitted from the X-ray focus 10 and advances, in order, to 1 Q C. This causes coinciding of an X-ray irradiation position C of the sample crystal 10 with the irradiation position of the visual light, permits determination of the irradiation position of the X-ray through the visual and direct detection of a light scattered from a point C, and permits the two-dimentional evaluation of a large- diametered crystal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55175164A JPS5798846A (en) | 1980-12-11 | 1980-12-11 | X-ray diffractometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55175164A JPS5798846A (en) | 1980-12-11 | 1980-12-11 | X-ray diffractometer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5798846A true JPS5798846A (en) | 1982-06-19 |
Family
ID=15991378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55175164A Pending JPS5798846A (en) | 1980-12-11 | 1980-12-11 | X-ray diffractometer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5798846A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014076974A1 (en) * | 2012-11-16 | 2014-05-22 | パルステック工業株式会社 | Diffraction ring forming device and diffraction ring forming system |
CN108401437A (en) * | 2015-12-11 | 2018-08-14 | 科磊股份有限公司 | X-ray scatterometry for high depth-width ratio structure is measured |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51121388A (en) * | 1975-04-16 | 1976-10-23 | Nec Corp | Apparatus for adjusting a specimen for x-ray diffration camera |
-
1980
- 1980-12-11 JP JP55175164A patent/JPS5798846A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51121388A (en) * | 1975-04-16 | 1976-10-23 | Nec Corp | Apparatus for adjusting a specimen for x-ray diffration camera |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014076974A1 (en) * | 2012-11-16 | 2014-05-22 | パルステック工業株式会社 | Diffraction ring forming device and diffraction ring forming system |
CN108401437A (en) * | 2015-12-11 | 2018-08-14 | 科磊股份有限公司 | X-ray scatterometry for high depth-width ratio structure is measured |
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