JPS57178135A - Specular surface defect observing device - Google Patents

Specular surface defect observing device

Info

Publication number
JPS57178135A
JPS57178135A JP6383481A JP6383481A JPS57178135A JP S57178135 A JPS57178135 A JP S57178135A JP 6383481 A JP6383481 A JP 6383481A JP 6383481 A JP6383481 A JP 6383481A JP S57178135 A JPS57178135 A JP S57178135A
Authority
JP
Japan
Prior art keywords
different
defect
observed
inspected
specular surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6383481A
Other languages
Japanese (ja)
Inventor
Shinichiro Takasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6383481A priority Critical patent/JPS57178135A/en
Publication of JPS57178135A publication Critical patent/JPS57178135A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To observe a minor defect easily and with high sensitivity even if it has a surface whose surface exponent is different, by irradiating a specular surface to be inspected, by plural parallel luminous fluxes having different irradiating angles. CONSTITUTION:A light from a light source provided in a lower casing 11 is converted to a parallel luminous flux through a Fresnel lens 13, is made incident to plane mirrors 19, 20 placed in 2 steps so as to surround a sample base 14 from 4 directions, on the inside wall surface of an upper casing 17, and illuminates a specular surface body 15 to be inspected, so as to satisfy the dark field condition. The reflected rays are observed directly through an observation window 16 or through a TV camera. In this way, a defect is observed by illuminating it by 8 kinds of paralllel luminous fluxes having each different direction and a low incident angle, therefore, a defect having a surface whose surface exponent is different is observed easily and with high sensitivity, as well.
JP6383481A 1981-04-27 1981-04-27 Specular surface defect observing device Pending JPS57178135A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6383481A JPS57178135A (en) 1981-04-27 1981-04-27 Specular surface defect observing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6383481A JPS57178135A (en) 1981-04-27 1981-04-27 Specular surface defect observing device

Publications (1)

Publication Number Publication Date
JPS57178135A true JPS57178135A (en) 1982-11-02

Family

ID=13240769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6383481A Pending JPS57178135A (en) 1981-04-27 1981-04-27 Specular surface defect observing device

Country Status (1)

Country Link
JP (1) JPS57178135A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63206638A (en) * 1987-02-24 1988-08-25 Nok Corp Inspection of surface flaw
JPH04299550A (en) * 1991-03-27 1992-10-22 Toshiba Corp Method and device for evaluating semiconductor substrate
WO2006104110A1 (en) * 2005-03-28 2006-10-05 Shibaura Mechatronics Corporation Method and device for inspecting surface of distorted silicon wafer
JP2007121120A (en) * 2005-10-28 2007-05-17 Naoetsu Electronics Co Ltd Wafer visual inspection device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63206638A (en) * 1987-02-24 1988-08-25 Nok Corp Inspection of surface flaw
JPH04299550A (en) * 1991-03-27 1992-10-22 Toshiba Corp Method and device for evaluating semiconductor substrate
WO2006104110A1 (en) * 2005-03-28 2006-10-05 Shibaura Mechatronics Corporation Method and device for inspecting surface of distorted silicon wafer
JPWO2006104110A1 (en) * 2005-03-28 2008-09-11 芝浦メカトロニクス株式会社 Surface inspection method and inspection apparatus for strained silicon wafer
US7679730B2 (en) 2005-03-28 2010-03-16 Shibaura Mechatronics Corporation Surface inspection apparatus and surface inspection method for strained silicon wafer
JP4576425B2 (en) * 2005-03-28 2010-11-10 芝浦メカトロニクス株式会社 Surface inspection method and inspection apparatus for strained silicon wafer
JP2007121120A (en) * 2005-10-28 2007-05-17 Naoetsu Electronics Co Ltd Wafer visual inspection device

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